High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts. / Engstrøm, Daniel Southcott; Savu, Veronica; Zhu, Xueni; Bu, Ian Y. Y.; Milne, William I.; Brugger, Jürgen; Bøggild, Peter.

In: Nano Letters, Vol. 11, No. 4, 2011, p. 1568-1574.

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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Engstrøm, Daniel Southcott; Savu, Veronica; Zhu, Xueni; Bu, Ian Y. Y.; Milne, William I.; Brugger, Jürgen; Bøggild, Peter / High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts.

In: Nano Letters, Vol. 11, No. 4, 2011, p. 1568-1574.

Publication: Research - peer-reviewJournal article – Annual report year: 2011

Bibtex

@article{4423c1bd6c884062a9d965f3118ae1fa,
title = "High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts",
publisher = "American Chemical Society",
author = "Engstrøm, {Daniel Southcott} and Veronica Savu and Xueni Zhu and Bu, {Ian Y. Y.} and Milne, {William I.} and Jürgen Brugger and Peter Bøggild",
year = "2011",
doi = "10.1021/nl104384b",
volume = "11",
number = "4",
pages = "1568--1574",
journal = "Nano Letters",
issn = "1530-6984",

}

RIS

TY - JOUR

T1 - High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

A1 - Engstrøm,Daniel Southcott

A1 - Savu,Veronica

A1 - Zhu,Xueni

A1 - Bu,Ian Y. Y.

A1 - Milne,William I.

A1 - Brugger,Jürgen

A1 - Bøggild,Peter

AU - Engstrøm,Daniel Southcott

AU - Savu,Veronica

AU - Zhu,Xueni

AU - Bu,Ian Y. Y.

AU - Milne,William I.

AU - Brugger,Jürgen

AU - Bøggild,Peter

PB - American Chemical Society

PY - 2011

Y1 - 2011

N2 - A new and versatile technique for the wafer scale nanofabrication of silicon nanowire (SiNW) and multiwalled carbon nanotube (MWNT) tips on atomic force microscope (AFM) probes is presented. Catalyst material for the SiNW and MWNT growth was deposited on prefabricated AFM probes using aligned wafer scale nanostencil lithography. Individual vertical SiNWs were grown epitaxially by a catalytic vapor−liquid−solid (VLS) process and MWNTs were grown by a plasma-enhanced chemical vapor (PECVD) process on the AFM probes. The AFM probes were tested for imaging micrometers-deep trenches, where they demonstrated a significantly better performance than commercial high aspect ratio tips. Our method demonstrates a reliable and cost-efficient route toward wafer scale manufacturing of SiNW and MWNT AFM probes.

AB - A new and versatile technique for the wafer scale nanofabrication of silicon nanowire (SiNW) and multiwalled carbon nanotube (MWNT) tips on atomic force microscope (AFM) probes is presented. Catalyst material for the SiNW and MWNT growth was deposited on prefabricated AFM probes using aligned wafer scale nanostencil lithography. Individual vertical SiNWs were grown epitaxially by a catalytic vapor−liquid−solid (VLS) process and MWNTs were grown by a plasma-enhanced chemical vapor (PECVD) process on the AFM probes. The AFM probes were tested for imaging micrometers-deep trenches, where they demonstrated a significantly better performance than commercial high aspect ratio tips. Our method demonstrates a reliable and cost-efficient route toward wafer scale manufacturing of SiNW and MWNT AFM probes.

KW - carbon nanotubes

KW - high aspect ratio

KW - AFM

KW - Nanostencil

KW - silicon nanowires

U2 - 10.1021/nl104384b

DO - 10.1021/nl104384b

JO - Nano Letters

JF - Nano Letters

SN - 1530-6984

IS - 4

VL - 11

SP - 1568

EP - 1574

ER -