High aspect ratio micro tool manufacturing for polymer replication using mu EDM of silicon, selective etching and electroforming
Publication: Research - peer-review › Journal article – Annual report year: 2008
Mass fabrication of polymer micro components with high aspect ratio micro-structures requires high performance micro tools allowing the use of low cost replication processes such as micro injection moulding. In this regard an innovative process chain, based on a combination of micro electrical discharge machining (mu EDM) of a silicon substrate, electroforming and selective etching was used for the manufacturing of a micro tool. The micro tool was employed for polymer replication by means of the injection moulding process.
|Journal||Microsystem Technologies : Micro- and Nanosystems Information Storage and Processing Systems|
|State||Published - 2008|
|Citations||Web of Science® Times Cited: 11|