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Mass fabrication of polymer micro components with high aspect ratio micro-structures requires high performance micro tools allowing the use of low cost replication processes such as micro injection moulding. In this regard an innovative process chain, based on a combination of micro electrical discharge machining (mu EDM) of a silicon substrate, electroforming and selective etching was used for the manufacturing of a micro tool. The micro tool was employed for polymer replication by means of the injection moulding process.
Original languageEnglish
JournalMicrosystem Technologies : Micro- and Nanosystems Information Storage and Processing Systems
Publication date2008
Volume14
Issue9-11
Pages1757-1764
ISSN0946-7076
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 7
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