TY - JOUR

T1 - Graphene Conductance Uniformity Mapping

A1 - Buron,Jonas Christian Due

A1 - Petersen,Dirch Hjorth

A1 - Bøggild,Peter

A1 - Cooke,David G.

A1 - Hilke,Michael

A1 - Sun,Jie

A1 - Whiteway,Eric

A1 - Nielsen,Peter F.

A1 - Hansen,Ole

A1 - Yurgens,August

A1 - Jepsen,Peter Uhd

AU - Buron,Jonas Christian Due

AU - Petersen,Dirch Hjorth

AU - Bøggild,Peter

AU - Cooke,David G.

AU - Hilke,Michael

AU - Sun,Jie

AU - Whiteway,Eric

AU - Nielsen,Peter F.

AU - Hansen,Ole

AU - Yurgens,August

AU - Jepsen,Peter Uhd

PB - American Chemical Society

PY - 2012

Y1 - 2012

N2 - We demonstrate a combination of micro four-point probe (M4PP) and non-contact terahertz time-domain spectroscopy (THz-TDS) measurements for centimeter scale quantitative mapping of the sheet conductance of large area chemical vapor deposited graphene films. Dual configuration M4PP measurements, demonstrated on graphene for the first time, provide valuable statistical insight into the influence of microscale defects on the conductance, while THz-TDS has potential as a fast, non-contact metrology method for mapping of the spatially averaged nanoscopic conductance on wafer-scale graphene with scan times of less than a minute for a 4-in. wafer. The combination of M4PP and THz-TDS conductance measurements, supported by micro Raman spectroscopy and optical imaging, reveals that the film is electrically continuous on the nanoscopic scale with microscopic defects likely originating from the transfer process, dominating the microscale conductance of the investigated graphene film.

AB - We demonstrate a combination of micro four-point probe (M4PP) and non-contact terahertz time-domain spectroscopy (THz-TDS) measurements for centimeter scale quantitative mapping of the sheet conductance of large area chemical vapor deposited graphene films. Dual configuration M4PP measurements, demonstrated on graphene for the first time, provide valuable statistical insight into the influence of microscale defects on the conductance, while THz-TDS has potential as a fast, non-contact metrology method for mapping of the spatially averaged nanoscopic conductance on wafer-scale graphene with scan times of less than a minute for a 4-in. wafer. The combination of M4PP and THz-TDS conductance measurements, supported by micro Raman spectroscopy and optical imaging, reveals that the film is electrically continuous on the nanoscopic scale with microscopic defects likely originating from the transfer process, dominating the microscale conductance of the investigated graphene film.

KW - Graphene

KW - Terahertz

KW - Micro four-point probe

KW - Metrology

KW - Imaging

KW - Electrical characterization

KW - Noninvasive characterization

KW - Spectroscopy

U2 - 10.1021/nl301551a

DO - 10.1021/nl301551a

JO - Nano Letters

JF - Nano Letters

SN - 1530-6984

ER -