Fundamental size limitations of micro four-point probes

Publication: Research - peer-reviewJournal article – Annual report year: 2009

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Fundamental size limitations of micro four-point probes. / Ansbæk, Thor; Petersen, Dirch Hjorth; Hansen, Ole; Larsen, Jakob B.; Hansen, Torben Mikael; Bøggild, Peter.

In: Microelectronic Engineering, Vol. 86, No. 4-6, 2009, p. 987-990.

Publication: Research - peer-reviewJournal article – Annual report year: 2009

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Author

Ansbæk, Thor; Petersen, Dirch Hjorth; Hansen, Ole; Larsen, Jakob B.; Hansen, Torben Mikael; Bøggild, Peter / Fundamental size limitations of micro four-point probes.

In: Microelectronic Engineering, Vol. 86, No. 4-6, 2009, p. 987-990.

Publication: Research - peer-reviewJournal article – Annual report year: 2009

Bibtex

@article{7961b2134a8a4c68955b79433420c24c,
title = "Fundamental size limitations of micro four-point probes",
author = "Thor Ansbæk and Petersen, {Dirch Hjorth} and Ole Hansen and Larsen, {Jakob B.} and Hansen, {Torben Mikael} and Peter Bøggild",
year = "2009",
doi = "10.1016/j.mee.2008.11.029",
volume = "86",
pages = "987--990",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier BV",
number = "4-6",

}

RIS

TY - JOUR

T1 - Fundamental size limitations of micro four-point probes

AU - Ansbæk,Thor

AU - Petersen,Dirch Hjorth

AU - Hansen,Ole

AU - Larsen,Jakob B.

AU - Hansen,Torben Mikael

AU - Bøggild,Peter

PY - 2009

Y1 - 2009

N2 - The continued down-scaling of integrated circuits and magnetic tunnel junctions (MTJ) for hard disc read heads presents a challenge to current metrology technology. The four-point probes (4PP), currently used for sheet resistance characterization in these applications, therefore must be down-scaled as well in order to correctly characterize the extremely thin films used. This presents a four-point probe design and fabrication challenge. We analyze the fundamental limitation on down-scaling of a generic micro four-point probe (M4PP) in a comprehensive study, where mechanical, thermal, and electrical effects are considered. We show that the most severe limits on down-scaling from a state of the art M4PP are set by electromigration, probe fracture or material strength, and thermal effects. Compared to current state of the art probes, however, there is still room for down-scaling.

AB - The continued down-scaling of integrated circuits and magnetic tunnel junctions (MTJ) for hard disc read heads presents a challenge to current metrology technology. The four-point probes (4PP), currently used for sheet resistance characterization in these applications, therefore must be down-scaled as well in order to correctly characterize the extremely thin films used. This presents a four-point probe design and fabrication challenge. We analyze the fundamental limitation on down-scaling of a generic micro four-point probe (M4PP) in a comprehensive study, where mechanical, thermal, and electrical effects are considered. We show that the most severe limits on down-scaling from a state of the art M4PP are set by electromigration, probe fracture or material strength, and thermal effects. Compared to current state of the art probes, however, there is still room for down-scaling.

U2 - 10.1016/j.mee.2008.11.029

DO - 10.1016/j.mee.2008.11.029

M3 - Journal article

VL - 86

SP - 987

EP - 990

JO - Microelectronic Engineering

T2 - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

IS - 4-6

ER -