Author: Ansbæk, Thor
Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800, Lyngby
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Author: Petersen, Dirch Hjorth
Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800, Kgs. Lyngby
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Author: Hansen, Ole
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800 , Kgs. Lyngby
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Author: Larsen, Jakob Bonne
Electroceramics, Fuel Cells and Solid State Chemistry Division, Risø National Laboratory for Sustainable Energy, Technical University of Denmark
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Author: Hansen, Torben Michael
Risø National Laboratory for Sustainable Energy, Technical University of Denmark