Full-field hard x-ray microscopy with interdigitated silicon lenses

Research output: Research - peer-reviewJournal article – Annual report year: 2016

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Full-field x-ray microscopy using x-ray objectives has become a mainstay of the biological and materials sciences. However, the inefficiency of existing objectives at x-ray energies above 15 keV has limited the technique to weakly absorbing or two-dimensional (2D) samples. Here, we show that significant gains in numerical aperture and spatial resolution may be possible at hard x-ray energies by using silicon-based optics comprising ‘interdigitated’ refractive silicon lenslets that alternate their focus between the horizontal and vertical directions. By capitalizing on the nano-manufacturing processes available to silicon, we show that it is possible to overcome the inherent inefficiencies of silicon-based optics and interdigitated geometries. As a proof-of-concept of Si-based interdigitated objectives, we demonstrate a prototype interdigitated lens with a resolution of ≈255 nm at 17 keV.
Original languageEnglish
JournalOptics Communications
Volume359
Pages (from-to)460-464
ISSN0030-4018
DOIs
StatePublished - 2016
CitationsWeb of Science® Times Cited: 9

    Research areas

  • X.ray, Optics, Imaging, Microscopy, Silicon
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