Fast silicon etching by plasma-sheath-lens focused negative ions
Publication: Research - peer-review › Conference abstract in proceedings – Annual report year: 2009
| Original language | English |
|---|---|
| Title | Book of Abstracts |
| Publication date | 2009 |
| Pages | 14-16 |
| State | Published |
Conference
| Conference | 17th International Colloquium on Plasma Processes |
|---|---|
| City | Marseille (FR) |
| Period | 01-01-09 → … |
Keywords
- Plasma processing, Fusion energy
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ID: 4009887