Fast silicon etching by plasma-sheath-lens focused negative ions

Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2009

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Original languageEnglish
Title of host publicationBook of Abstracts
Publication date2009
Pages14-16
StatePublished

Conference

Conference17th International Colloquium on Plasma Processes
CityMarseille (FR)
Period01/01/09 → …

Keywords

  • Plasma processing, Fusion energy
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