TY - JOUR

T1 - Fabrication of resonant micro cantilevers with integrated transparent fluidic channel

A1 - Khan,Faheem

A1 - Schmid,Silvan

A1 - Davis,Zachary James

A1 - Dohn,Søren

A1 - Boisen,Anja

AU - Khan,Faheem

AU - Schmid,Silvan

AU - Davis,Zachary James

AU - Dohn,Søren

AU - Boisen,Anja

PB - Elsevier BV

PY - 2011

Y1 - 2011

N2 - Microfabricated cantilevers are proving their potential as excellent tools for analysis applications. In this paper, we describe the design, fabrication and testing of resonant micro cantilevers with integrated transparent fluidic channels. The cantilevers have been devised to measure the density of fluids or detect particles suspended in a fluid by sensing the change in total mass of the structure. The 4 × 4 μm2 integrated microfluidic channel makes it possible to flow a fluid through the channel while the cantilevers are resonating. The movement of any particles (present in the fluid) can be visually observed through the transparent fluidic channel. The resonant frequency of the cantilever is changed by the fluid inside the channel, due to the change in mass. The shift in the resonant frequency can be translated into a density of the fluid or into the presence of macro/micro molecules. Such cantilevers can be used as density sensors, to monitor growth of biological cells, measure mass of particles, etc.

AB - Microfabricated cantilevers are proving their potential as excellent tools for analysis applications. In this paper, we describe the design, fabrication and testing of resonant micro cantilevers with integrated transparent fluidic channels. The cantilevers have been devised to measure the density of fluids or detect particles suspended in a fluid by sensing the change in total mass of the structure. The 4 × 4 μm2 integrated microfluidic channel makes it possible to flow a fluid through the channel while the cantilevers are resonating. The movement of any particles (present in the fluid) can be visually observed through the transparent fluidic channel. The resonant frequency of the cantilever is changed by the fluid inside the channel, due to the change in mass. The shift in the resonant frequency can be translated into a density of the fluid or into the presence of macro/micro molecules. Such cantilevers can be used as density sensors, to monitor growth of biological cells, measure mass of particles, etc.

KW - Resonant cantilever

KW - Bio medical

KW - Resonant frequency

KW - Microfluidic channel

U2 - 10.1016/j.mee.2011.02.096

DO - 10.1016/j.mee.2011.02.096

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

IS - 8

VL - 88

SP - 2300

EP - 2303

ER -