Fabrication of High-Frequency pMUT Arrays on Silicon Substrates

Publication: Research - peer-reviewJournal article – Annual report year: 2010

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A novel technique based on silicon micromachining for fabrication of linear arrays of high-frequency piezoelectric micromachined ultrasound transducers (pMUT) is presented. Piezoelectric elements are formed by deposition of lead zirconia titanate into etched features of a silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated element is characterized by pulse echo response.
Original languageEnglish
JournalI E E E Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Publication date2010
Volume57
Issue6
Pages1470-1477
ISSN0885-3010
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 9

Keywords

  • Ultrasonic transducer arrays, Micromachining, High-frequency effects, Ultrasonic imaging, Piezoelectric transducers
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