Publication: Research - peer-review › Journal article – Annual report year: 2010
A novel technique based on silicon micromachining for fabrication of linear arrays of high-frequency piezoelectric micromachined ultrasound transducers (pMUT) is presented. Piezoelectric elements are formed by deposition of lead zirconia titanate into etched features of a silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated element is characterized by pulse echo response.
|Journal||I E E E Transactions on Ultrasonics, Ferroelectrics and Frequency Control|
|State||Published - 2010|
|Citations||Web of Science® Times Cited: 9|
- Ultrasonic transducer arrays, Micromachining, High-frequency effects, Ultrasonic imaging, Piezoelectric transducers