Fabrication of high aspect ratio SU-8 micropillar arrays

Publication: Research - peer-reviewPoster – Annual report year: 2011

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Original languageEnglish
Publication date2011
StatePublished

Conference

Conference37th International Conference on Micro and Nano Engineering
Number37
CountryGermany
CityBerlin
Period19/09/1123/09/11
Internet addresshttp://www.mne-conf.org/GENERAL/index.php
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