TY - JOUR

T1 - Fabrication of combined-scale nano- and microfluidic polymer systems using a multilevel dry etching, electroplating and molding process

A1 - Tanzi,Simone

A1 - Østergaard,Peter Friis

A1 - Matteucci,Marco

A1 - Christiansen,Thomas Lehrmann

A1 - Cech,Jiri

A1 - Marie,Rodolphe

A1 - Taboryski,Rafael J.

AU - Tanzi,Simone

AU - Østergaard,Peter Friis

AU - Matteucci,Marco

AU - Christiansen,Thomas Lehrmann

AU - Cech,Jiri

AU - Marie,Rodolphe

AU - Taboryski,Rafael J.

PY - 2012

Y1 - 2012

N2 - Microfabricated single-cell capture and DNA stretching devices have been produced by<br/>injection molding. The fabrication scheme employed deep reactive ion etching in a silicon<br/>substrate, electroplating in nickel and molding in cyclic olefin polymer. This work proposes<br/>technical solutions to fabrication challenges associated with chip sealing and demolding of<br/>polymer high-volume replication methods. UV-assisted thermal bonding was found to ensure a<br/>strong seal of the microstructures in the molded part without altering the geometry of the<br/>channels. In the DNA stretching device, a low aspect ratio nanoslit (1/200) connecting two<br/>larger micro-channels was used to stretch a 168.5 kbp DNA molecule, while in the other<br/>device single-HeLa cells were captured against a micro-aperture connecting two larger<br/>microfluidic channels. Different dry etching processes have been investigated for the master<br/>origination of the cell-capture device. The combination of a modified Bosch process and an<br/>isotropic polysilicon etch was found to ensure the ease of demolding by resulting in slightly<br/>positively tapered sidewalls with negligible undercut at the mask interface.

AB - Microfabricated single-cell capture and DNA stretching devices have been produced by<br/>injection molding. The fabrication scheme employed deep reactive ion etching in a silicon<br/>substrate, electroplating in nickel and molding in cyclic olefin polymer. This work proposes<br/>technical solutions to fabrication challenges associated with chip sealing and demolding of<br/>polymer high-volume replication methods. UV-assisted thermal bonding was found to ensure a<br/>strong seal of the microstructures in the molded part without altering the geometry of the<br/>channels. In the DNA stretching device, a low aspect ratio nanoslit (1/200) connecting two<br/>larger micro-channels was used to stretch a 168.5 kbp DNA molecule, while in the other<br/>device single-HeLa cells were captured against a micro-aperture connecting two larger<br/>microfluidic channels. Different dry etching processes have been investigated for the master<br/>origination of the cell-capture device. The combination of a modified Bosch process and an<br/>isotropic polysilicon etch was found to ensure the ease of demolding by resulting in slightly<br/>positively tapered sidewalls with negligible undercut at the mask interface.

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 09601317

VL - 22

ER -