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@article{aa46767d755944a1b3a40daa942a68b7,
title = "Fabrication of combined-scale nano- and microfluidic polymer systems using a multilevel dry etching, electroplating and molding process",
abstract = "Microfabricated single-cell capture and DNA stretching devices have been produced byinjection molding. The fabrication scheme employed deep reactive ion etching in a siliconsubstrate, electroplating in nickel and molding in cyclic olefin polymer. This work proposestechnical solutions to fabrication challenges associated with chip sealing and demolding ofpolymer high-volume replication methods. UV-assisted thermal bonding was found to ensure astrong seal of the microstructures in the molded part without altering the geometry of thechannels. In the DNA stretching device, a low aspect ratio nanoslit (1/200) connecting twolarger micro-channels was used to stretch a 168.5 kbp DNA molecule, while in the otherdevice single-HeLa cells were captured against a micro-aperture connecting two largermicrofluidic channels. Different dry etching processes have been investigated for the masterorigination of the cell-capture device. The combination of a modified Bosch process and anisotropic polysilicon etch was found to ensure the ease of demolding by resulting in slightlypositively tapered sidewalls with negligible undercut at the mask interface.",
author = "Simone Tanzi and Østergaard, {Peter Friis} and Marco Matteucci and Christiansen, {Thomas Lehrmann} and Jiri Cech and Rodolphe Marie and Taboryski, {Rafael J.}",
year = "2012",
volume = "22",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "Institute of Physics Publishing Ltd.",

}

RIS

TY - JOUR

T1 - Fabrication of combined-scale nano- and microfluidic polymer systems using a multilevel dry etching, electroplating and molding process

AU - Tanzi,Simone

AU - Østergaard,Peter Friis

AU - Matteucci,Marco

AU - Christiansen,Thomas Lehrmann

AU - Cech,Jiri

AU - Marie,Rodolphe

AU - Taboryski,Rafael J.

PY - 2012

Y1 - 2012

N2 - Microfabricated single-cell capture and DNA stretching devices have been produced byinjection molding. The fabrication scheme employed deep reactive ion etching in a siliconsubstrate, electroplating in nickel and molding in cyclic olefin polymer. This work proposestechnical solutions to fabrication challenges associated with chip sealing and demolding ofpolymer high-volume replication methods. UV-assisted thermal bonding was found to ensure astrong seal of the microstructures in the molded part without altering the geometry of thechannels. In the DNA stretching device, a low aspect ratio nanoslit (1/200) connecting twolarger micro-channels was used to stretch a 168.5 kbp DNA molecule, while in the otherdevice single-HeLa cells were captured against a micro-aperture connecting two largermicrofluidic channels. Different dry etching processes have been investigated for the masterorigination of the cell-capture device. The combination of a modified Bosch process and anisotropic polysilicon etch was found to ensure the ease of demolding by resulting in slightlypositively tapered sidewalls with negligible undercut at the mask interface.

AB - Microfabricated single-cell capture and DNA stretching devices have been produced byinjection molding. The fabrication scheme employed deep reactive ion etching in a siliconsubstrate, electroplating in nickel and molding in cyclic olefin polymer. This work proposestechnical solutions to fabrication challenges associated with chip sealing and demolding ofpolymer high-volume replication methods. UV-assisted thermal bonding was found to ensure astrong seal of the microstructures in the molded part without altering the geometry of thechannels. In the DNA stretching device, a low aspect ratio nanoslit (1/200) connecting twolarger micro-channels was used to stretch a 168.5 kbp DNA molecule, while in the otherdevice single-HeLa cells were captured against a micro-aperture connecting two largermicrofluidic channels. Different dry etching processes have been investigated for the masterorigination of the cell-capture device. The combination of a modified Bosch process and anisotropic polysilicon etch was found to ensure the ease of demolding by resulting in slightlypositively tapered sidewalls with negligible undercut at the mask interface.

M3 - Journal article

VL - 22

JO - Journal of Micromechanics and Microengineering

T2 - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

ER -