Fabrication of Cantilevers by NIL

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2008

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Original languageEnglish
Title of host publicationIn proceeding of "International Workshop on Nanomechanical Cantilever Sensors"
PublisherMax Planck Institute for Polymer Research
Publication date2008
StatePublished - 2008
Peer-reviewedYes

Workshop

WorkshopInternational Workshop on Nanomechanical Cantilever Sensors
CountryGermany
CityMainze
Period19/05/200821/05/2008
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