Fabrication of Cantilevers by NIL

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2008

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Original languageEnglish
Title of host publicationIn proceeding of "International Workshop on Nanomechanical Cantilever Sensors"
PublisherMax Planck Institute for Polymer Research
Publication date2008
StatePublished

Workshop

WorkshopInternational Workshop on Nanomechanical Cantilever Sensors
CountryGermany
CityMainze
Period19/05/0821/05/08
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