Fabrication of 3D Air-core MEMS Inductors

Research output: Contribution to conferenceConference abstract for conference – Annual report year: 2016Researchpeer-review

Standard

Fabrication of 3D Air-core MEMS Inductors. / Lê Thanh, Hoà; Mizushima, Io; Tang, Peter Torben; Ouyang, Ziwei; Jensen, Flemming; Han, Anpan.

2016. Abstract from 42nd International conference on Micro and Nano Engineering, Vienna, Austria.

Research output: Contribution to conferenceConference abstract for conference – Annual report year: 2016Researchpeer-review

Harvard

Lê Thanh, H, Mizushima, I, Tang, PT, Ouyang, Z, Jensen, F & Han, A 2016, 'Fabrication of 3D Air-core MEMS Inductors' 42nd International conference on Micro and Nano Engineering, Vienna, Austria, 19/09/2016 - 23/09/2016, .

APA

Lê Thanh, H., Mizushima, I., Tang, P. T., Ouyang, Z., Jensen, F., & Han, A. (2016). Fabrication of 3D Air-core MEMS Inductors. Abstract from 42nd International conference on Micro and Nano Engineering, Vienna, Austria.

CBE

Lê Thanh H, Mizushima I, Tang PT, Ouyang Z, Jensen F, Han A. 2016. Fabrication of 3D Air-core MEMS Inductors. Abstract from 42nd International conference on Micro and Nano Engineering, Vienna, Austria.

MLA

Vancouver

Lê Thanh H, Mizushima I, Tang PT, Ouyang Z, Jensen F, Han A. Fabrication of 3D Air-core MEMS Inductors. 2016. Abstract from 42nd International conference on Micro and Nano Engineering, Vienna, Austria.

Author

Lê Thanh, Hoà ; Mizushima, Io ; Tang, Peter Torben ; Ouyang, Ziwei ; Jensen, Flemming ; Han, Anpan. / Fabrication of 3D Air-core MEMS Inductors. Abstract from 42nd International conference on Micro and Nano Engineering, Vienna, Austria.

Bibtex

@conference{3cf02b00cfc24606860bd490de10c1ba,
title = "Fabrication of 3D Air-core MEMS Inductors",
keywords = "Inductor, Through-silicon vias, Electroplating, atomic layer deposition, Deep reactive ion etching",
author = "{L{\^e} Thanh}, Ho{\`a} and Io Mizushima and Tang, {Peter Torben} and Ziwei Ouyang and Flemming Jensen and Anpan Han",
year = "2016",
language = "English",
note = "42nd International conference on Micro and Nano Engineering, MNE 2016 ; Conference date: 19-09-2016 Through 23-09-2016",

}

RIS

TY - ABST

T1 - Fabrication of 3D Air-core MEMS Inductors

AU - Lê Thanh, Hoà

AU - Mizushima, Io

AU - Tang, Peter Torben

AU - Ouyang, Ziwei

AU - Jensen, Flemming

AU - Han, Anpan

PY - 2016

Y1 - 2016

KW - Inductor

KW - Through-silicon vias

KW - Electroplating

KW - atomic layer deposition

KW - Deep reactive ion etching

M3 - Conference abstract for conference

ER -