Fabrication of 3D Air-core MEMS Inductors

Publication: Research - peer-reviewConference abstract for conference – Annual report year: 2016

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Original languageEnglish
Publication date2016
StatePublished - 2016
Event42nd International conference on Micro and Nano Engineering - Vienna, Austria

Conference

Conference42nd International conference on Micro and Nano Engineering
Number42
CountryAustria
CityVienna
Period19/09/201623/09/2016

    Keywords

  • Inductor, Through-silicon vias, Electroplating, atomic layer deposition, Deep reactive ion etching
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