Extraction of positive and negative ion beams by discrete and modal focusing effects and their applications for surface processing
Publication: Research › Conference abstract in proceedings – Annual report year: 2011
| Original language | English |
|---|---|
| Title | Abstract booklet |
| Publication date | 2011 |
| Pages | 11-11 |
| State | Published |
Conference
| Conference | Innovation in thin film processing and characterization and Magnetron ion processing and arc technologies European conference |
|---|---|
| City | Nancy (FR), 15-17 Nov |
| Period | 01-01-11 → … |
Loading map data...
ID: 6334113