Extraction of positive and negative ion beams by discrete and modal focusing effects and their applications for surface processing

Publication: ResearchConference abstract in proceedings – Annual report year: 2011

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Original languageEnglish
TitleAbstract booklet
Publication date2011
Pages11-11
StatePublished

Conference

ConferenceInnovation in thin film processing and characterization and Magnetron ion processing and arc technologies European conference
CityNancy (FR), 15-17 Nov
Period01/01/11 → …
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