Extraction of positive and negative ion beams by discrete and modal focusing effects and their applications for surface processing
Publication: Research › Conference abstract in proceedings – Annual report year: 2011
|Title of host publication||Abstract booklet|
|State||Published - 2011|
|Conference||Innovation in thin film processing and characterization and Magnetron ion processing and arc technologies European conference|
|City||Nancy (FR), 15-17 Nov|
|Period||01/01/2011 → …|
Loading map data...