Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2011

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Original languageEnglish
Title of host publicationProceedings
Publication date2011
Pages59-60
ISBN (print)978-4-86348-216-6
StatePublished

Conference

Conference33rd International Symposium on Dry Process
Number33
CountryJapan
CityKyoto
Period10/11/1111/11/11
Internet addresshttp://www.dps2011.kuaero.kyoto-u.ac.jp/
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