Dry etching for flat panel displays
Publication: Research - peer-review › Book chapter – Annual report year: 2010
| Original language | English |
|---|---|
| Title | Handbook of Visual Display Technology |
| Number of pages | 2000 |
| Publisher | Springer |
| Publication date | 2011 |
| ISBN (print) | 978-3-540-79566-7 |
| State | Accepted |
Keywords
- Plasma processing, Fusion energy
ID: 4964316