Dry etching for flat panel displays

Publication: Research - peer-reviewBook chapter – Annual report year: 2013

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Original languageEnglish
TitleHandbook of Visual Display Technology
EditorsJanglin Chen, Wayne Cranton, Mark Fihn
PublisherSpringer
Publication date2012
Pages871-884
ISBN (print)978-3-540-79568-1
StatePublished

Keywords

  • Plasma processing, Fusion energy
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