Drift study of SU8 cantilevers in liquid and gaseous environments

Publication: Research - peer-reviewJournal article – Annual report year: 2010

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We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1 mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.
Original languageEnglish
JournalUltramicroscopy
Publication date2010
Volume110
Issue6
Pages596-598
ISSN0304-3991
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 5

Keywords

  • Drift, SU8, Cantilever based sensors, Optical readout
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