Development of nanostructured protective "sight glasses" for IR gas sensors
Publication: Research - peer-review › Conference article – Annual report year: 2011
In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.
| Original language | English |
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| Journal | Proceedings of the SPIE - The International Society for Optical Engineering |
| Publication date | 2011 |
| Volume | 8016 |
| Pages | 80160S |
| ISSN | 0277-786X |
| DOIs | |
| State | Published |
Conference
| Conference | Window and Dome Technologies and Materials XII |
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| City | Orlando, Florida, USA |
| Period | 01-01-11 → … |
| Citations | Web of Science® Times Cited: 0 |
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Keywords
- Protective window, Nanostructured surface, Infrared gas sensor, Combustion pollution control technologies, Superhydrophobic, Anti-reflective surface
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