Development of nanostructured protective "sight glasses" for IR gas sensors

Publication: Research - peer-reviewConference article – Annual report year: 2011

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In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.
Original languageEnglish
JournalProceedings of the SPIE - The International Society for Optical Engineering
Publication date2011
Volume8016
Pages80160S
ISSN0277-786X
DOIs
StatePublished

Conference

ConferenceWindow and Dome Technologies and Materials XII
CityOrlando, Florida, USA
Period01/01/11 → …
CitationsWeb of Science® Times Cited: 0

Keywords

  • Protective window, Nanostructured surface, Infrared gas sensor, Combustion pollution control technologies, Superhydrophobic, Anti-reflective surface
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