Publication: Research - peer-review › Conference article – Annual report year: 2011
In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.
|Journal||Proceedings of the SPIE - The International Society for Optical Engineering|
|State||Published - 2011|
|Conference||Window and Dome Technologies and Materials XII|
|City||Orlando, Florida, USA|
|Period||01/01/2011 → …|
|Citations||Web of Science® Times Cited: 0|
- Protective window, Nanostructured surface, Infrared gas sensor, Combustion pollution control technologies, Superhydrophobic, Anti-reflective surface
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