Development and production of a multilayer-coated X-ray reecting stack for the Athena mission

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2016

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Original languageEnglish
Title of host publicationProceedings of Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray
EditorsJan-Willem A. den Herder, Tadayuki Takahashi, Marshall Bautz
Number of pages10
Volume9905
PublisherSPIE - International Society for Optical Engineering
Publication date2016
Article number99055P
DOIs
StatePublished - 2016
EventSpace Telescopes and Instrumentation 2016 - Edinburgh, United Kingdom

Conference

ConferenceSpace Telescopes and Instrumentation 2016
CountryUnited Kingdom
CityEdinburgh
Period26/06/201601/07/2016
CitationsWeb of Science® Times Cited: 0

    Keywords

  • Athena, Silicon pore optics (SPO), AFM, Surface Roughness, Photolithography Process, Plasma Cleaning, Multilayer Deposition, DC Magnetron Sputtering, Lift-off Process, Stacking, XRR, X-ray Optics
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