Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio

Publication: Research - peer-reviewJournal article – Annual report year: 1997

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@article{b2449d9cbc4b4c0aa8bd1d01bac92fbd,
title = "Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio",
publisher = "I E E E",
author = "Larsen, {Ulrik Darling} and Ole Sigmund and Siebe Bouwstra",
note = "Copyright: 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE",
year = "1997",
doi = "10.1109/84.585787",
volume = "6",
pages = "99--106",
journal = "I E E E Journal of Microelectromechanical Systems",
issn = "1057-7157",

}

RIS

TY - JOUR

T1 - Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio

A1 - Larsen,Ulrik Darling

A1 - Sigmund,Ole

A1 - Bouwstra,Siebe

AU - Larsen,Ulrik Darling

AU - Sigmund,Ole

AU - Bouwstra,Siebe

PB - I E E E

PY - 1997

Y1 - 1997

N2 - This paper describes a new way to design and fabricate compliant micromechanisms and material structures with negative Poisson's ratio (NPR). The design of compliant mechanisms and material structures is accomplished in an automated way using a numerical topology optimization method, The procedure allows the user to specify the elastic properties of materials or the mechanical advantages (MA's) or geometrical advantages (GA's) of compliant mechanisms and returns the optimal structures. The topologies obtained by the numerical procedure require practically no interaction by the engineer before they can be transferred to the fabrication unit. Fabrication is carried out by patterning a sputtered silicon on a plasma-enhanced chemical vapor deposition (PECVD) glass with a laser micromachining setup. Subsequently, the structures are etched into the underlying PECVD glass, and the glass is underetched, all in one two-step reactive ion etching (RIE) process. The components are tested using a probe placed on an x-y stage. This fast prototyping allows newly developed topologies to be fabricated and tested within the same day

AB - This paper describes a new way to design and fabricate compliant micromechanisms and material structures with negative Poisson's ratio (NPR). The design of compliant mechanisms and material structures is accomplished in an automated way using a numerical topology optimization method, The procedure allows the user to specify the elastic properties of materials or the mechanical advantages (MA's) or geometrical advantages (GA's) of compliant mechanisms and returns the optimal structures. The topologies obtained by the numerical procedure require practically no interaction by the engineer before they can be transferred to the fabrication unit. Fabrication is carried out by patterning a sputtered silicon on a plasma-enhanced chemical vapor deposition (PECVD) glass with a laser micromachining setup. Subsequently, the structures are etched into the underlying PECVD glass, and the glass is underetched, all in one two-step reactive ion etching (RIE) process. The components are tested using a probe placed on an x-y stage. This fast prototyping allows newly developed topologies to be fabricated and tested within the same day

U2 - 10.1109/84.585787

DO - 10.1109/84.585787

JO - I E E E Journal of Microelectromechanical Systems

JF - I E E E Journal of Microelectromechanical Systems

SN - 1057-7157

VL - 6

SP - 99

EP - 106

ER -