Demonstrator realization with basic process: COTECH Deliverable 7.2.1 (CP-IP 214491-2)

Publication: Research - peer-reviewReport – Annual report year: 2012

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Original languageEnglish
Place of publicationVienna
PublisherCOTECH
Number of pages62
StatePublished - 2012
Peer-reviewedYes
NameCOnverging TECHnologies for micro systems manufacturing

Bibliographical note

SP7 - Industrial prototypes and demonstrators, WP7.2 - Process prototyping based on up-scales process chain

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