Conventional and 360 degree electron tomography of a micro-crystalline silicon solar cell

Publication: Research - peer-reviewConference article – Annual report year: 2011

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Bright-field (BF) and annular dark-field (ADF) electron tomography in the transmission electron microscope (TEM) are used to characterize elongated porous regions or cracks (simply referred to as cracks thereafter) in micro-crystalline silicon (μc-Si:H) solar cell. The limitations of inferring the 3D geometry of a crack from a tilt series of images acquired from 100-nm-thick focused ion beam (FTB) milled TEM specimen are discussed. In an attempt to maximize the specimen tilt range and to reduce the effects of diffraction and phase contrast on the reconstruction, both BF and ADF electron tomography are used to acquire 360° tilt series of images from a FIB-prepared needle-shaped μc-Si:H specimen.
Original languageEnglish
Book seriesJournal of Physics: Conference Series
Publication date2011
Volume326
Issue1
Pages012057
ISSN1742-6588
DOIs
StatePublished

Conference

Conference17th International Conference on Microscopy of Semiconducting Materials
Number17
CountryUnited Kingdom
CityCambridge
Period04/04/1107/04/11
CitationsWeb of Science® Times Cited: 0
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