Circular Piezoelectric Accelerometer for High Band Width Application

Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2009

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Circular Piezoelectric Accelerometer for High Band Width Application. / Hindrichsen, Christian Carstensen; Larsen, Jack; Lou-Møller, Rasmus; Hansen, K.; Thomsen, Erik Vilain.

IEEE Sensors 2009. IEEE, 2009.

Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2009

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Hindrichsen, Christian Carstensen; Larsen, Jack; Lou-Møller, Rasmus; Hansen, K.; Thomsen, Erik Vilain / Circular Piezoelectric Accelerometer for High Band Width Application.

IEEE Sensors 2009. IEEE, 2009.

Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2009

Bibtex

@inbook{090095cabeee447b8861335e3a68dfb3,
title = "Circular Piezoelectric Accelerometer for High Band Width Application",
publisher = "IEEE",
author = "Hindrichsen, {Christian Carstensen} and Jack Larsen and Rasmus Lou-Møller and K. Hansen and Thomsen, {Erik Vilain}",
year = "2009",
doi = "10.1109/ICSENS.2009.5398277",
isbn = "978-1-4244-4548-6",
booktitle = "IEEE Sensors 2009",

}

RIS

TY - ABST

T1 - Circular Piezoelectric Accelerometer for High Band Width Application

A1 - Hindrichsen,Christian Carstensen

A1 - Larsen,Jack

A1 - Lou-Møller,Rasmus

A1 - Hansen,K.

A1 - Thomsen,Erik Vilain

AU - Hindrichsen,Christian Carstensen

AU - Larsen,Jack

AU - Lou-Møller,Rasmus

AU - Hansen,K.

AU - Thomsen,Erik Vilain

PB - IEEE

PY - 2009

Y1 - 2009

N2 - An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ¿m) is suspended by a 20 ¿m thick annular silicon membrane (radius = 1800 ¿m). A 24 ¿m PZT screen printed thick film is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge sensitivity of 0.23 pC/g and a voltage sensitivity of 0.24 mV/g are measured.

AB - An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ¿m) is suspended by a 20 ¿m thick annular silicon membrane (radius = 1800 ¿m). A 24 ¿m PZT screen printed thick film is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge sensitivity of 0.23 pC/g and a voltage sensitivity of 0.24 mV/g are measured.

U2 - 10.1109/ICSENS.2009.5398277

DO - 10.1109/ICSENS.2009.5398277

SN - 978-1-4244-4548-6

BT - IEEE Sensors 2009

T2 - IEEE Sensors 2009

ER -