Circular Piezoelectric Accelerometer for High Band Width Application

Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2009

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Circular Piezoelectric Accelerometer for High Band Width Application. / Hindrichsen, Christian Carstensen; Larsen, Jack; Lou-Møller, Rasmus; Hansen, K.; Thomsen, Erik Vilain.

IEEE Sensors 2009. IEEE, 2009.

Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2009

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Hindrichsen, Christian Carstensen; Larsen, Jack; Lou-Møller, Rasmus; Hansen, K.; Thomsen, Erik Vilain / Circular Piezoelectric Accelerometer for High Band Width Application.

IEEE Sensors 2009. IEEE, 2009.

Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2009

Bibtex

@inbook{090095cabeee447b8861335e3a68dfb3,
title = "Circular Piezoelectric Accelerometer for High Band Width Application",
author = "Hindrichsen, {Christian Carstensen} and Jack Larsen and Rasmus Lou-Møller and K. Hansen and Thomsen, {Erik Vilain}",
note = "Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.",
year = "2009",
doi = "10.1109/ICSENS.2009.5398277",
isbn = "978-1-4244-4548-6",
booktitle = "IEEE Sensors 2009",
publisher = "IEEE",

}

RIS

TY - ABST

T1 - Circular Piezoelectric Accelerometer for High Band Width Application

AU - Hindrichsen,Christian Carstensen

AU - Larsen,Jack

AU - Lou-Møller,Rasmus

AU - Hansen,K.

AU - Thomsen,Erik Vilain

N1 - Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

PY - 2009

Y1 - 2009

N2 - An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ¿m) is suspended by a 20 ¿m thick annular silicon membrane (radius = 1800 ¿m). A 24 ¿m PZT screen printed thick film is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge sensitivity of 0.23 pC/g and a voltage sensitivity of 0.24 mV/g are measured.

AB - An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ¿m) is suspended by a 20 ¿m thick annular silicon membrane (radius = 1800 ¿m). A 24 ¿m PZT screen printed thick film is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge sensitivity of 0.23 pC/g and a voltage sensitivity of 0.24 mV/g are measured.

U2 - 10.1109/ICSENS.2009.5398277

DO - 10.1109/ICSENS.2009.5398277

M3 - Conference abstract in proceedings

SN - 978-1-4244-4548-6

BT - IEEE Sensors 2009

T2 - IEEE Sensors 2009

PB - IEEE

ER -