Capillary Induced Stiction of MEMS Materials

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2005

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Original languageEnglish
TitleProceedings of the World Tribology Congress III
Publication date2005
StatePublished

Conference

ConferenceWorld Tribology Congress III
CountryUnited States
CityWashington DC
Period12/09/0516/09/05
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