Capillary Induced Stiction of MEMS Materials
Publication: Research - peer-review › Article in proceedings – Annual report year: 2005
| Original language | English |
|---|---|
| Title | Proceedings of the World Tribology Congress III |
| Publication date | 2005 |
| State | Published |
Conference
| Conference | World Tribology Congress III |
|---|---|
| Country | United States |
| City | Washington DC |
| Period | 12-09-05 → 16-09-05 |
Loading map data...
ID: 2396977