Cantilever-like micromechanical sensors

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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Cantilever-like micromechanical sensors. / Boisen, Anja; Dohn, Søren; Keller, Stephan Sylvest; Schmid, Silvan; Tenje, Maria.

In: Reports on Progress in Physics, Vol. 74, No. 3, 2011, p. 036101.

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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Author

Boisen, Anja; Dohn, Søren; Keller, Stephan Sylvest; Schmid, Silvan; Tenje, Maria / Cantilever-like micromechanical sensors.

In: Reports on Progress in Physics, Vol. 74, No. 3, 2011, p. 036101.

Publication: Research - peer-reviewJournal article – Annual report year: 2011

Bibtex

@article{870f5ba053ca4ecabca22524e1d858cb,
title = "Cantilever-like micromechanical sensors",
publisher = "Institute of Physics Publishing",
author = "Anja Boisen and Søren Dohn and Keller, {Stephan Sylvest} and Silvan Schmid and Maria Tenje",
year = "2011",
doi = "10.1088/0034-4885/74/3/036101",
volume = "74",
number = "3",
pages = "036101",
journal = "Reports on Progress in Physics",
issn = "0034-4885",

}

RIS

TY - JOUR

T1 - Cantilever-like micromechanical sensors

A1 - Boisen,Anja

A1 - Dohn,Søren

A1 - Keller,Stephan Sylvest

A1 - Schmid,Silvan

A1 - Tenje,Maria

AU - Boisen,Anja

AU - Dohn,Søren

AU - Keller,Stephan Sylvest

AU - Schmid,Silvan

AU - Tenje,Maria

PB - Institute of Physics Publishing

PY - 2011

Y1 - 2011

N2 - The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon-and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection.

AB - The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon-and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection.

U2 - 10.1088/0034-4885/74/3/036101

DO - 10.1088/0034-4885/74/3/036101

JO - Reports on Progress in Physics

JF - Reports on Progress in Physics

SN - 0034-4885

IS - 3

VL - 74

SP - 036101

ER -