Cantilever-Based Microwave Biosensors: Analysis, Designs and Optimizations

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2011

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This paper presents a novel microwave readout scheme for measuring deflection of cantilevers in nanometer range. The cantilever deflection can be sensed by the variation of transmission levels or resonant frequencies of microwave signals. The sensitivity of the cantilever biosensor based on LC resonators is at first theoretically analyzed. A LC resonator based biosensor with beams is designed and optimized by using 3D electromagnetic (EM) simulations, where the beam is a typical variation of cantilevers. The sensitivity of the lossless biosensor is predicted as 4.6MHz/nm. The 3-dB bandwidths of the resonances are narrowed for improving the resolution of distinguishing resonances by reducing conductive loss of electrodes. The lossy biosensor can achieve the highest sensitivity as 5.6 MHz/nm and narrowest 3-dB bandwidth as 5 GHz.
Original languageEnglish
Title of host publicationProceedings of the 27th Annual Review of Progress in Applied Computational Electromagnetics
Publication date2011
StatePublished - 2011
Event27th Annual Review of Progress in Applied Computational Electromagnetics - Williamsburg, Virginia, USA


Conference27th Annual Review of Progress in Applied Computational Electromagnetics
CityWilliamsburg, Virginia, USA
Period01/01/2011 → …


  • LC resonators, Microwave biosensors, Cantilevers, Electromagnetic simulations, Beams
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ID: 6370489