Cantilever-based bio-chemical sensor integrated in a microliquid handling system

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2001

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The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (ΔR/R)=4.6:10 -4 (N/m)-1 and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.
Original languageEnglish
Title of host publicationProceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems
PublisherIEEE
Publication date2001
Pages401-404
ISBN (print)0-7803-5998-4
DOIs
StatePublished

Conference

Conference14th IEEE International Conference on Micro Electro Mechanical Systems
Number14
CountrySwitzerland
CityInterlaken
Period21/01/0125/01/01

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Copyright: 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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