Application of the method of auxiliary sources to a defect-detection inverse problem of optical diffraction microscopy

Publication: Research - peer-reviewJournal article – Annual report year: 2010

View graph of relations

We propose a method of numerical solution of a type of inverse scattering problem that arises in the optical characterisation/quality control of nanostructures. The underlying global, ill-posed, nonlinear optimisation problem is first localised by best-fit matching of library and measured diffraction efficiency patterns. The inverse problem is then solved using piecewise linear interpolation between the best far-field matches. Finally, the results are refined, on average, by solving an additional local optimisation problem formulated in terms of the method of auxiliary sources. To illustrate the proposed method, we apply it in a concrete quantitative characterisation of a non-periodic, nano-scale grating defect, with numerically simulated measurements. It is shown that the presented procedure can solve the inverse problem with an accuracy usually thought to require rigorous electromagnetic theories.
Original languageEnglish
JournalEuropean Optical Society. Journal. Rapid Publications
Publication date2010
Volume5
Pages10021
ISSN1990-2573
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 3

Keywords

  • nanogratings, optical diffraction microscopy, method of auxiliary sources, inverse scattering
Download as:
Download as PDF
Select render style:
APAAuthorCBEHarvardMLAStandardVancouverShortLong
PDF
Download as HTML
Select render style:
APAAuthorCBEHarvardMLAStandardVancouverShortLong
HTML
Download as Word
Select render style:
APAAuthorCBEHarvardMLAStandardVancouverShortLong
Word

ID: 4895402