Publication: Research - peer-review › Article in proceedings – Annual report year: 2010
The Method of Auxiliary Sources is used for characterisation of grating defects. Grating profiles are characterised by best fit matching of a library of diffraction efficiencies with numerical simulated diffraction efficiencies with defects. It is shown that the presented method can solve the inverse problem with an accuracy usually thought to require rigorous electromagnetic theories.
|Title||Progress in Industrial Mathematics at ECMI 2008|
|Place of publication||Heidelberg, Dordrecht, London, New York|
|Conference||15th European Conference on Mathematics for Industry|
|Period||30-06-08 → 04-07-08|
|Citations||Web of Science® Times Cited: 0|
- nano structures, auxiliary sources, Optical diffraction, Electromagnetic waves
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