Anti-stiction coating of PDMS moulds for rapid microchannel fabrication by double replica moulding

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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Anti-stiction coating of PDMS moulds for rapid microchannel fabrication by double replica moulding. / Zhuang, Guisheng; Kutter, Jörg Peter.

In: Journal of Micromechanics and Microengineering, Vol. 21, No. 10, 2011, p. 105020.

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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Author

Zhuang, Guisheng; Kutter, Jörg Peter / Anti-stiction coating of PDMS moulds for rapid microchannel fabrication by double replica moulding.

In: Journal of Micromechanics and Microengineering, Vol. 21, No. 10, 2011, p. 105020.

Publication: Research - peer-reviewJournal article – Annual report year: 2011

Bibtex

@article{e8d6a78e67a0483e95aeb8c8b9596d7f,
title = "Anti-stiction coating of PDMS moulds for rapid microchannel fabrication by double replica moulding",
keywords = "Interfaces and thin films, Liquids and polymers, Surfaces, Soft matter, Condensed matter",
author = "Guisheng Zhuang and Kutter, {Jörg Peter}",
year = "2011",
doi = "10.1088/0960-1317/21/10/105020",
volume = "21",
number = "10",
pages = "105020",
journal = "Journal of Micromechanics and Microengineering",
issn = "09601317",

}

RIS

TY - JOUR

T1 - Anti-stiction coating of PDMS moulds for rapid microchannel fabrication by double replica moulding

A1 - Zhuang,Guisheng

A1 - Kutter,Jörg Peter

AU - Zhuang,Guisheng

AU - Kutter,Jörg Peter

PY - 2011

Y1 - 2011

N2 - <p>In this paper, we report a simple and precise method to rapidly replicate master structures for fast microchannel fabrication by double replica moulding of polydimethylsiloxane (PDMS). A PDMS mould was surface-treated by vapour phase deposition of 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS), which resulted in an anti-stiction layer for the improved release after PDMS casting. The deposition of FDTS on an O2 plasma-activated surface of PDMS produced a reproducible and well-performing anti-stiction monolayer of fluorocarbon, and we used the FDTS-coated moulds as micro-masters for rapid replication of micro-structures, avoiding the necessity to have to use other, more costly and fragile master materials. Our protocol has been shown to reliably fabricate PDMS-based microfluidic devices in a low-cost and efficient manner. The replicas were further employed as micro-contract stamps to fabricate polymer-based waveguides.</p>

AB - <p>In this paper, we report a simple and precise method to rapidly replicate master structures for fast microchannel fabrication by double replica moulding of polydimethylsiloxane (PDMS). A PDMS mould was surface-treated by vapour phase deposition of 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS), which resulted in an anti-stiction layer for the improved release after PDMS casting. The deposition of FDTS on an O2 plasma-activated surface of PDMS produced a reproducible and well-performing anti-stiction monolayer of fluorocarbon, and we used the FDTS-coated moulds as micro-masters for rapid replication of micro-structures, avoiding the necessity to have to use other, more costly and fragile master materials. Our protocol has been shown to reliably fabricate PDMS-based microfluidic devices in a low-cost and efficient manner. The replicas were further employed as micro-contract stamps to fabricate polymer-based waveguides.</p>

KW - Interfaces and thin films

KW - Liquids and polymers

KW - Surfaces

KW - Soft matter

KW - Condensed matter

U2 - 10.1088/0960-1317/21/10/105020

DO - 10.1088/0960-1317/21/10/105020

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 09601317

IS - 10

VL - 21

SP - 105020

ER -