An electrochemical-cantilever platform for hybrid sensing applications

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2011

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This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined mechanical and electrochemical performance is investigated. Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM.
Original languageEnglish
TitleIEEE 24. International Conference on Micro Electro Mechanical Systems
PublisherIEEE
Publication date2011
ISBN (print)978-1-4244-9632-7
DOIs
StatePublished

Conference

Conference24th International Conference on Micro Electro Mechanical Systems
Number24
CountryMexico
CityCancun
Period23/01/1127/01/11
Internet addresshttp://www.ieee-mems2011.org/
CitationsWeb of Science® Times Cited: No match on DOI

Keywords

  • Micromechanical devices, Cantilevers, Flow control, Microfabrication, Electrochemical analysis
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