An Astigmatic Detection System for Polymeric Cantilever-based Sensors
Publication: Research - peer-review › Journal article – Annual report year: 2012
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An Astigmatic Detection System for Polymeric Cantilever-based Sensors. / Hwu, En-Te; Liao, Hsien-Shun; Bosco, Filippo; Chen, Ching-Hsiu; Keller, Stephan Sylvest; Boisen, Anja; Huang, Kuang-Yuh.
In: Journal of Sensors, 2012, p. 580939.Publication: Research - peer-review › Journal article – Annual report year: 2012
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TY - JOUR
T1 - An Astigmatic Detection System for Polymeric Cantilever-based Sensors
A1 - Hwu,En-Te
A1 - Liao,Hsien-Shun
A1 - Bosco,Filippo
A1 - Chen,Ching-Hsiu
A1 - Keller,Stephan Sylvest
A1 - Boisen,Anja
A1 - Huang,Kuang-Yuh
AU - Hwu,En-Te
AU - Liao,Hsien-Shun
AU - Bosco,Filippo
AU - Chen,Ching-Hsiu
AU - Keller,Stephan Sylvest
AU - Boisen,Anja
AU - Huang,Kuang-Yuh
PY - 2012
Y1 - 2012
N2 - We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80 MHz, allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS.
AB - We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80 MHz, allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS.
U2 - 10.1155/2012/580939
DO - 10.1155/2012/580939
JO - Journal of Sensors
JF - Journal of Sensors
SN - 1687725x
SP - 580939
ER -