An Astigmatic Detection System for Polymeric Cantilever-based Sensors

Publication: Research - peer-reviewJournal article – Annual report year: 2012

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An Astigmatic Detection System for Polymeric Cantilever-based Sensors. / Hwu, En-Te; Liao, Hsien-Shun; Bosco, Filippo; Chen, Ching-Hsiu; Keller, Stephan Sylvest; Boisen, Anja; Huang, Kuang-Yuh.

In: Journal of Sensors, 2012, p. 580939.

Publication: Research - peer-reviewJournal article – Annual report year: 2012

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Hwu, En-Te; Liao, Hsien-Shun; Bosco, Filippo; Chen, Ching-Hsiu; Keller, Stephan Sylvest; Boisen, Anja; Huang, Kuang-Yuh / An Astigmatic Detection System for Polymeric Cantilever-based Sensors.

In: Journal of Sensors, 2012, p. 580939.

Publication: Research - peer-reviewJournal article – Annual report year: 2012

Bibtex

@article{d37d441417974c80a122e2c61d5b82e6,
title = "An Astigmatic Detection System for Polymeric Cantilever-based Sensors",
author = "En-Te Hwu and Hsien-Shun Liao and Filippo Bosco and Ching-Hsiu Chen and Keller, {Stephan Sylvest} and Anja Boisen and Kuang-Yuh Huang",
year = "2012",
doi = "10.1155/2012/580939",
pages = "580939",
journal = "Journal of Sensors",
issn = "1687725x",

}

RIS

TY - JOUR

T1 - An Astigmatic Detection System for Polymeric Cantilever-based Sensors

A1 - Hwu,En-Te

A1 - Liao,Hsien-Shun

A1 - Bosco,Filippo

A1 - Chen,Ching-Hsiu

A1 - Keller,Stephan Sylvest

A1 - Boisen,Anja

A1 - Huang,Kuang-Yuh

AU - Hwu,En-Te

AU - Liao,Hsien-Shun

AU - Bosco,Filippo

AU - Chen,Ching-Hsiu

AU - Keller,Stephan Sylvest

AU - Boisen,Anja

AU - Huang,Kuang-Yuh

PY - 2012

Y1 - 2012

N2 - We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80 MHz, allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS.

AB - We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80 MHz, allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS.

U2 - 10.1155/2012/580939

DO - 10.1155/2012/580939

JO - Journal of Sensors

JF - Journal of Sensors

SN - 1687725x

SP - 580939

ER -