An Astigmatic Detection System for Polymeric Cantilever-based Sensors
Publication: Research - peer-review › Journal article – Annual report year: 2012
We demonstrate the use of an astigmatic detection system (ADS) for resonance frequency identification of polymer microcantilever sensors. The ADS technology is based on a DVD optical head combined with an optical microscope (OM). The optical head has a signal bandwidth of 80 MHz, allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution. Furthermore, an external excitation can intensify the resonance amplitude, enhancing the signal- to-noise ratio. The full width at half maximum (FWHM) of the laser spot is 568 nm, which facilitates read-out on potentially submicrometer-sized cantilevers. The resonant frequency of SU-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ADS.
| Original language | English |
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| Journal | Journal of Sensors |
| Publication date | 2012 |
| Pages | 580939 |
| ISSN | 1687725x |
| DOIs | |
| State | Published |
| Citations | Web of Science® Times Cited: No match on DOI |
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ID: 6584721