All-Optical Frequency Modulated MEMS Strain Sensor Using Nanoscale Braggs Grating

Publication: Research - peer-review › Article in proceedings – Annual report year: 2010

Author: Reck, Kasper
Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads , 2800, Kgs. Lyngby
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Author: Almind, Ninia Sejersen
Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800, Lyngby
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Author: Mar, Mikkel Dysseholm
Nano-Bio Integrated Systems Group, Biomedical Micro Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark, 2800, Kgs. Lyngby
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Author: Hübner, Jörg
DTU Danchip, Technical University of Denmark
Author: Hansen, Ole
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800 , Kgs. Lyngby
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Author: Thomsen, Erik Vilain
Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800 , Kgs. Lyngby
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Original language	English
Title	All-Optical Frequency Modulated MEMS Strain Sensor Using Nanoscale Braggs Grating
Publication date	2009
State	Published

Conference	All-Optical Frequency Modulated MEMS Strain Sensor Using Nanoscale Braggs Grating
Period	01-01-09 → …

ID: 4561067

Crystallographic dependence of the lateral undercut wet etch rate of Al0.5In0.5P in diluted HCl for III-V sacrificial release