Addressing the mechanical deformation of flexible stamps for nanoimprint lithography on double-curved surfaces
Publication: Research › Poster – Annual report year: 2012
|Period||24-10-12 → 26-10-12|
Fabrication of the master silicon stamp and the flexible stamp was performed by NIL Technology ApS, a partner in the NANOPLAST project. This work is financially supported by The Danish National Advanced Technology Foundation, which is highly acknowledged.