Addressing the mechanical deformation of flexible stamps for nanoimprint lithography on double-curved surfaces
Publication: Research › Poster – Annual report year: 2012
| Original language | English |
|---|---|
| Publication date | 2012 |
| State | Published |
Conference
| Conference | NNT 2012 |
|---|---|
| Country | United States |
| City | Napa, CA |
| Period | 24-10-12 → 26-10-12 |
| Internet address | http://www.nntconf.org/ |
Bibliographical note
Fabrication of the master silicon stamp and the flexible stamp was performed by NIL Technology ApS, a partner in the NANOPLAST project. This work is financially supported by The Danish National Advanced Technology Foundation, which is highly acknowledged.
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ID: 12698104