Addressing the mechanical deformation of flexible stamps for nanoimprint lithography on double-curved surfaces
Publication: Research › Poster – Annual report year: 2012
|State||Published - 2012|
|Event||NNT 2012 - Napa, CA, United States|
|Period||24/10/2012 → 26/10/2012|
Fabrication of the master silicon stamp and the flexible stamp was performed by NIL Technology ApS, a partner in the NANOPLAST project. This work is financially supported by The Danish National Advanced Technology Foundation, which is highly acknowledged.