Accurate microfour-point probe sheet resistance measurements on small samples

Publication: Research - peer-reviewJournal article – Annual report year: 2009

Standard

Harvard

APA

CBE

MLA

Vancouver

Author

Bibtex

@article{69c3bd66722f4a849c95a33e9b2f17d8,
title = "Accurate microfour-point probe sheet resistance measurements on small samples",
keywords = "microelectrodes, electric resistance measurement, micromechanical devices, probes",
publisher = "American Institute of Physics",
author = "Sune Thorsteinsson and Fei Wang and Petersen, {Dirch Hjorth} and Hansen, {Torben Mikael} and Daniel Kjær and Rong Lin and Jang-Yong Kim and Nielsen, {Peter Folmer} and Ole Hansen",
note = "Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.",
year = "2009",
doi = "10.1063/1.3125050",
volume = "80",
number = "5",
pages = "053902",
journal = "Review of Scientific Instruments",
issn = "0034-6748",

}

RIS

TY - JOUR

T1 - Accurate microfour-point probe sheet resistance measurements on small samples

A1 - Thorsteinsson,Sune

A1 - Wang,Fei

A1 - Petersen,Dirch Hjorth

A1 - Hansen,Torben Mikael

A1 - Kjær,Daniel

A1 - Lin,Rong

A1 - Kim,Jang-Yong

A1 - Nielsen,Peter Folmer

A1 - Hansen,Ole

AU - Thorsteinsson,Sune

AU - Wang,Fei

AU - Petersen,Dirch Hjorth

AU - Hansen,Torben Mikael

AU - Kjær,Daniel

AU - Lin,Rong

AU - Kim,Jang-Yong

AU - Nielsen,Peter Folmer

AU - Hansen,Ole

PB - American Institute of Physics

PY - 2009

Y1 - 2009

N2 - We show that accurate sheet resistance measurements on small samples may be performed using microfour-point probes without applying correction factors. Using dual configuration measurements, the sheet resistance may be extracted with high accuracy when the microfour-point probes are in proximity of a mirror plane on small samples with dimensions of a few times the probe pitch. We calculate theoretically the size of the “sweet spot,” where sufficiently accurate sheet resistances result and show that even for very small samples it is feasible to do correction free extraction of the sheet resistance with sufficient accuracy. As an example, the sheet resistance of a 40 µm (50 µm) square sample may be characterized with an accuracy of 0.3% (0.1%) using a 10 µm pitch microfour-point probe and assuming a probe alignment accuracy of ±2.5 µm. ©2009 American Institute of Physics

AB - We show that accurate sheet resistance measurements on small samples may be performed using microfour-point probes without applying correction factors. Using dual configuration measurements, the sheet resistance may be extracted with high accuracy when the microfour-point probes are in proximity of a mirror plane on small samples with dimensions of a few times the probe pitch. We calculate theoretically the size of the “sweet spot,” where sufficiently accurate sheet resistances result and show that even for very small samples it is feasible to do correction free extraction of the sheet resistance with sufficient accuracy. As an example, the sheet resistance of a 40 µm (50 µm) square sample may be characterized with an accuracy of 0.3% (0.1%) using a 10 µm pitch microfour-point probe and assuming a probe alignment accuracy of ±2.5 µm. ©2009 American Institute of Physics

KW - microelectrodes

KW - electric resistance measurement

KW - micromechanical devices

KW - probes

UR - http://link.aip.org/link/?RSINAK/80/053902/1

U2 - 10.1063/1.3125050

DO - 10.1063/1.3125050

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 5

VL - 80

SP - 053902

ER -