A MEMS Energy Harvesting Device for Vibration with Low Acceleration

Publication: Research - peer-reviewConference article – Annual report year: 2012

NullPointerException

View graph of relations

We propose a polymer electret based energy harvesting device in order to extract energy from vibration sources with low acceleration. With MEMS technology, a silicon structure is fabricated which can resonate in 2D directions. Thanks to the excellent mechanical properties of the silicon material, the proof mass could be successfully driven by an external vibrations with acceleration as low as 0.014g (∼0.14 m/s2). A root mean square (RMS) power output of 1.17μW under 0.014g RMS acceleration at 75Hz is measured when an optimal load of 20.3 MΩ is applied. The frequency response of the device is also studied and a high Q factor of 250 is achieved.
Original languageEnglish
JournalProcedia Engineering
Publication date2012
Volume47
Pages770-773
ISSN1877-7058
DOIs
StatePublished

Conference

ConferenceEurosensors 2012
NumberXXVI
CountryPoland
CityKrakow
Period09/09/1212/09/12
CitationsWeb of Science® Times Cited: 2

Keywords

  • MEMS, Micro generator, Energy harvesting device, Wireless sensor networks
Download as:
Download as PDF
Select render style:
APAAuthorCBEHarvardMLAStandardVancouverShortLong
PDF
Download as HTML
Select render style:
APAAuthorCBEHarvardMLAStandardVancouverShortLong
HTML
Download as Word
Select render style:
APAAuthorCBEHarvardMLAStandardVancouverShortLong
Word

ID: 18273055