Eugen Stamate

  1. 2007
  2. Published

    Ozone generation by micro-plasma devices: Feasibility study. / Fateev, Alexander; Stamate, Eugen; Michelsen, Poul.

    Proceedings (CD-ROM). ed. / J. Schmidt; M. Simek; S. Pekarek; V. Prukner. Prague : Institute of Plasma Physics AS CR, 2007. p. 1078-1081.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2007

  3. Published

    Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2. / Nakao, S. (Invited author); Stamate, Eugen (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4869-4873.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  4. Published

    Proceedings of the International Symposium on Dry Process - DPS 2005. / Stamate, Eugen; Fujiwara, N.

    In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4843-4845.

    Publication: ResearchEditorial – Annual report year: 2007

  5. Published

    Using transient sheath indeuced by short high-voltage pulse for uniform plasma ion implantation. / Holtzer, N.; Sugai, H.; Saito, T.; Stamate, Eugen.

    In: Jap. J. Appl. Phys. Pt. 2, Vol. 46, No. 33-35, 2007, p. L858-L860.

    Publication: Research - peer-reviewJournal article – Annual report year: 2007

  6. 2006
  7. Not written here

    Development of high-efficiency laser Thomson scattering measurement system for the investigation of EEDF in surface wave plasma. / Aramaki, M.; Kobayashi, J.; Kono, A.; Stamate, Eugen; Sugai, H.

    In: Thin Solid Films, Vol. 506-507, 2006, p. 679 – 682.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  8. Not written here

    Improvement of the dose uniformity in plasma immersed ion implantation by introducing a vertical biased ring. / Stamate, Eugen; Holtzer, N.; Sugai, H.

    In: Thin Solid Films, Vol. 506-507, 2006, p. 571-574.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  9. Not written here

    Investigation of energetic electrons in a 915 MHz microwave discharge produced in Ar. / Stamate, Eugen; Nakao, S.; Sugai, H.

    In: Thin Solid Films, Vol. 506-507, 2006, p. 701-704.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  10. 2005
  11. Not written here

    Complex ion-focusing effect by the sheath above the wafer in plasma immersion ion implantation. / Stamate, Eugen; Holtzer, N.; Sugai, H.

    In: Applied Physics Letters, Vol. 86, No. 26, 2005, p. 261501-1 - 261501-3.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

  12. Not written here

    Discrete focusing effect of positive ions by a plasma-sheath lens. / Stamate, Eugen; Sugai.

    In: Physical Review E (Statistical, Nonlinear, and Soft Matter Physics), Vol. 72, No. 3, 2005, p. 36407-1 - 36407-7.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

  13. Not written here

    Modal focusing effect of positive and negative ions by a three-dimensional plasma-sheath lens. / Stamate, Eugen; Sugai, H.

    In: Physical Review Letters, Vol. 94, No. 12, 2005, p. 125004-1 - 125004-4.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

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