Eugen Stamate

  1. 2007
  2. Published

    Charge dynamics in a three-dimensional plasma-sheath lens; phenomenology and applications. / Stamate, E. (Invited author).

    Proceedings (CD-ROM). ed. / J. Schmidt; M. Simek; S. Pekarek; V. Prukner. Prague : Institute of Plasma Physics AS CR, 2007.

    Publication: ResearchConference abstract in proceedings – Annual report year: 2007

  3. Published

    Charge focusing effects in a three-dimensional plasma sheath lens. / Stamate, Eugen.

    2007. Abstract from 3rd Annual meeting Danish Physical Society, Nyborg, Denmark.

    Publication: ResearchConference abstract for conference – Annual report year: 2007

  4. Published

    Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect. / Stamate, Eugen (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, 2007, p. 4853-4859.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  5. Published

    Investigation of the ion dose non-uniformity caused by sheath-lens focusing effect on silicon wafers. / Holtzer, N. (Invited author); Stamate, Eugen (Invited author); Toyoda, H. (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, 2007, p. 4887-4891.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  6. Published

    Ozone generation by micro-plasma devices: Feasibility study. / Fateev, Alexander; Stamate, Eugen; Michelsen, Poul.

    Proceedings (CD-ROM). ed. / J. Schmidt; M. Simek; S. Pekarek; V. Prukner. Prague : Institute of Plasma Physics AS CR, 2007. p. 1078-1081.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2007

  7. Published

    Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2. / Nakao, S. (Invited author); Stamate, Eugen (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4869-4873.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  8. Published

    Proceedings of the International Symposium on Dry Process - DPS 2005. / Stamate, Eugen; Fujiwara, N.

    In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4843-4845.

    Publication: ResearchEditorial – Annual report year: 2007

  9. Published

    Using transient sheath indeuced by short high-voltage pulse for uniform plasma ion implantation. / Holtzer, N.; Sugai, H.; Saito, T.; Stamate, Eugen.

    In: Jap. J. Appl. Phys. Pt. 2, Vol. 46, No. 33-35, 2007, p. L858-L860.

    Publication: Research - peer-reviewJournal article – Annual report year: 2007

  10. 2006
  11. Development of high-efficiency laser Thomson scattering measurement system for the investigation of EEDF in surface wave plasma. / Aramaki, M.; Kobayashi, J.; Kono, A.; Stamate, Eugen; Sugai, H.

    In: Thin Solid Films, Vol. 506-507, 2006, p. 679 – 682.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  12. Improvement of the dose uniformity in plasma immersed ion implantation by introducing a vertical biased ring. / Stamate, Eugen; Holtzer, N.; Sugai, H.

    In: Thin Solid Films, Vol. 506-507, 2006, p. 571-574.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

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