Eugen Stamate
- 2007
- Published
Investigation of the ion dose non-uniformity caused by sheath-lens focusing effect on silicon wafers. / Holtzer, N. (Invited author); Stamate, Eugen (Invited author); Toyoda, H. (Invited author); Sugai, H. (Invited author).
In: Thin Solid Films, Vol. 515, 2007, p. 4887-4891.Publication: Research - peer-review › Conference article – Annual report year: 2007
- Published
Ozone generation by micro-plasma devices: Feasibility study. / Fateev, Alexander; Stamate, Eugen; Michelsen, Poul.
In: Proceedings (CD-ROM). ed. / J. Schmidt; M. Simek; S. Pekarek; V. Prukner. Prague : Institute of Plasma Physics AS CR, 2007. p. 1078-1081.Publication: Research - peer-review › Article in proceedings – Annual report year: 2007
- Published
Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2. / Nakao, S. (Invited author); Stamate, Eugen (Invited author); Sugai, H. (Invited author).
In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4869-4873.Publication: Research - peer-review › Conference article – Annual report year: 2007
- Published
Proceedings of the International Symposium on Dry Process - DPS 2005. / Stamate, Eugen; Fujiwara, N.
In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4843-4845.Publication: Research › Editorial – Annual report year: 2007
- Published
Using transient sheath indeuced by short high-voltage pulse for uniform plasma ion implantation. / Holtzer, N.; Sugai, H.; Saito, T.; Stamate, Eugen.
In: Jap. J. Appl. Phys. Pt. 2, Vol. 46, No. 33-35, 2007, p. L858-L860.Publication: Research - peer-review › Journal article – Annual report year: 2007
- 2006
- External
Development of high-efficiency laser Thomson scattering measurement system for the investigation of EEDF in surface wave plasma. / Aramaki, M.; Kobayashi, J.; Kono, A.; Stamate, Eugen; Sugai, H.
In: Thin Solid Films, Vol. 506-507, 2006, p. 679 – 682.Publication: Research - peer-review › Journal article – Annual report year: 2006
- External
Improvement of the dose uniformity in plasma immersed ion implantation by introducing a vertical biased ring. / Stamate, Eugen; Holtzer, N.; Sugai, H.
In: Thin Solid Films, Vol. 506-507, 2006, p. 571-574.Publication: Research - peer-review › Journal article – Annual report year: 2006
- External
Investigation of energetic electrons in a 915 MHz microwave discharge produced in Ar. / Stamate, Eugen; Nakao, S.; Sugai, H.
In: Thin Solid Films, Vol. 506-507, 2006, p. 701-704.Publication: Research - peer-review › Journal article – Annual report year: 2006
- 2005
- External
Complex ion-focusing effect by the sheath above the wafer in plasma immersion ion implantation. / Stamate, Eugen; Holtzer, N.; Sugai, H.
In: Applied Physics Letters, Vol. 86, No. 26, 2005, p. 261501-1 - 261501-3.Publication: Research - peer-review › Journal article – Annual report year: 2005
- External
Discrete focusing effect of positive ions by a plasma-sheath lens. / Stamate, Eugen; Department of Electrical Engineering and Computer Science, Nagoya University.
In: Physical Review E (Statistical, Nonlinear, and Soft Matter Physics), Vol. 72, No. 3, 2005, p. 36407-1 - 36407-7.Publication: Research - peer-review › Journal article – Annual report year: 2005