Eugen Stamate

  1. Research › Journal article
  2. Visualization of the sheath-lens focusing effect to disk and square electrodes. / Stamate, Eugen; Sugai, H.

    In: I E E E Transactions on Plasma Science, Vol. 33, No. 2, 2005, p. 534-535.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

  3. Research › Conference article
  4. Published

    Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect. / Stamate, Eugen (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, 2007, p. 4853-4859.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  5. Published

    Investigation of the ion dose non-uniformity caused by sheath-lens focusing effect on silicon wafers. / Holtzer, N. (Invited author); Stamate, Eugen (Invited author); Toyoda, H. (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, 2007, p. 4887-4891.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  6. Published

    Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2. / Nakao, S. (Invited author); Stamate, Eugen (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4869-4873.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  7. Research › Editorial
  8. Published

    Preface - 20th Symposium on Plasma Science for Materials (SPSM-20). / Hori, M.; Sekine, M.; Han, J.G.; Stamate, Eugen; Ventzek, P.; Watanabe, T.

    In: Thin Solid Films, Vol. 516, No. 19, 2008, p. 6541-6541.

    Publication: ResearchEditorial – Annual report year: 2008

  9. Published

    Proceedings of the International Symposium on Dry Process - DPS 2005. / Stamate, Eugen; Fujiwara, N.

    In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4843-4845.

    Publication: ResearchEditorial – Annual report year: 2007

  10. Published

    Proceedings of the international symposium on dry process - DPS 2006. / Stamate, Eugen; Ono, K.; Shiratani, M.; Economou, D.J.; Chang, J.P.; Kusano, E.; Lee, N.-E.; Lee, J.K.; Fujiwara, N.

    In: Thin Solid Films, Vol. 516, No. 11, 2008, p. 3441-3442.

    Publication: ResearchEditorial – Annual report year: 2008

  11. Research › Report
  12. Published

    Novel methods of ozone generation by micro-plasma concept : Final report. / Fateev, Alexander; Chiper, Alina Silvia; Chen, Weifeng; Stamate, Eugen.

    Risø National Laboratory for Sustainable Energy, 2008. 17 p.

    Publication: ResearchReport – Annual report year: 2008

  13. Published

    Pilot test and optimization of plasma based deNOx. / Stamate, Eugen; Chen, Weifeng; Michelsen, Poul.

    Roskilde : Danmarks Tekniske Universitet, Risø Nationallaboratoriet for Bæredygtig Energi, 2009. 32 p. (Denmark. Forskningscenter Risoe. Risoe-R; No. 1689(EN)).

    Publication: ResearchReport – Annual report year: 2009

  14. Research › Book chapter
  15. Published

    Dry etching for flat panel displays. / Stamate, Eugen; Yeom, Geun Young.

    Handbook of Visual Display Technology. ed. / Janglin Chen; Wayne Cranton; Mark Fihn. Springer, 2012. p. 871-884.

    Publication: Research - peer-reviewBook chapter – Annual report year: 2013

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