Eugen Stamate

  1. Research › Journal article
  2. Sheath-lens probe for negative ion detection in reactive plasmas. / Stamate, Eugen; Sugai, H.; Takai, O.; Ohe, K.

    In: Journal of Applied Physics, Vol. 95, 2004, p. 830-833.

    Publication: Research - peer-reviewJournal article – Annual report year: 2004

  3. Test function for the determination of plasma parameters by electric probes. / Stamate, Eugen; Popa, G.; Ohe, K.

    In: Review of Scientific Instruments, Vol. 70, No. 1, 1999, p. 58-62.

    Publication: Research - peer-reviewJournal article – Annual report year: 1999

  4. Published

    Using transient sheath indeuced by short high-voltage pulse for uniform plasma ion implantation. / Holtzer, N.; Sugai, H.; Saito, T.; Stamate, Eugen.

    In: Jap. J. Appl. Phys. Pt. 2, Vol. 46, No. 33-35, 2007, p. L858-L860.

    Publication: Research - peer-reviewJournal article – Annual report year: 2007

  5. Visualization of the sheath-lens focusing effect to disk and square electrodes. / Stamate, Eugen; Sugai, H.

    In: I E E E Transactions on Plasma Science, Vol. 33, No. 2, 2005, p. 534-535.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

  6. Research › Conference article
  7. Published

    Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect. / Stamate, Eugen (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, 2007, p. 4853-4859.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  8. Published

    Investigation of the ion dose non-uniformity caused by sheath-lens focusing effect on silicon wafers. / Holtzer, N. (Invited author); Stamate, Eugen (Invited author); Toyoda, H. (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, 2007, p. 4887-4891.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  9. Published

    Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2. / Nakao, S. (Invited author); Stamate, Eugen (Invited author); Sugai, H. (Invited author).

    In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4869-4873.

    Publication: Research - peer-reviewConference article – Annual report year: 2007

  10. Published

    Status and challenges in electrical diagnostics of processing plasmas. / Stamate, Eugen.

    In: Surface and Coatings Technology, Vol. 260, 2014, p. 401-410.

    Publication: Research - peer-reviewConference article – Annual report year: 2015

  11. Research › Editorial
  12. Published

    Preface - 20th Symposium on Plasma Science for Materials (SPSM-20). / Hori, M.; Sekine, M.; Han, J.G.; Stamate, Eugen; Ventzek, P.; Watanabe, T.

    In: Thin Solid Films, Vol. 516, No. 19, 2008, p. 6541-6541.

    Publication: ResearchEditorial – Annual report year: 2008

  13. Published

    Proceedings of the International Symposium on Dry Process - DPS 2005. / Stamate, Eugen; Fujiwara, N.

    In: Thin Solid Films, Vol. 515, No. 12, 2007, p. 4843-4845.

    Publication: ResearchEditorial – Annual report year: 2007

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