Dirch Hjorth Petersen

  1. 2016
  2. Published

    Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper. / Wen, Liang Gong; Roussel, Philippe; Pedreira, Olalla Varela; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela I.; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Østerberg, Frederik Westergaard; Hansen, Ole; Petersen, Dirch Hjorth; Opsomer, Karl; Detavernie, Christophe; Wilson, Christopher J.; Van Elshocht, Sven; Croes, Kristof; Bommels, Jürgen; Tokei, Zsolt; Adelmann, Christoph.

    In: A C S Applied Materials and Interfaces, Vol. 8, No. 39, 2016, p. 26119-26125.

    Publication: Research - peer-reviewJournal article – Annual report year: 2016

  3. Published

    Defect evolution and dopant activation in laser annealed Si and Ge. / Cristiano, F.; Shayesteh, M.; Duffy, R.; Huet, K.; Mazzamuto, F.; Qiu, Y.; Quillec, M.; Henrichsen, H.H.; Nielsen, P. F.; Petersen, Dirch Hjorth; La Magna, A.; Caruso, G.; Boninelli, S.

    In: Materials Science in Semiconductor Processing, Vol. 42, 2016, p. 188-195.

    Publication: Research - peer-reviewJournal article – Annual report year: 2016

  4. Published
  5. Published

    Multi-electrode probe geometry optimization for characterization of magnetic tunnel junction stacks. / Cagliani, Alberto; Kjær, Daniel; Østerberg, Frederik Westergaard; Hansen, Ole; Nielsen, Peter Folmer; Petersen, Dirch Hjorth.

    2016. Abstract from 13th Joint MMM-Intermag Conference, San Diego, CA, United States.

    Publication: Research - peer-reviewConference abstract for conference – Annual report year: 2016

  6. Published

    Optimized SU-8 pyrolysis for fabrication of pyrolytic carbon microelectrodes. / Hassan, Yasmin Mohamed; Caviglia, Claudia; Hemanth, Suhith; Mackenzie, David; Petersen, Dirch Hjorth; Alstrøm, Tommy Sonne; Keller, Stephan Sylvest.

    2016. Abstract from 42nd International conference on Micro and Nano Engineering, Vienna, Austria.

    Publication: Research - peer-reviewConference abstract for conference – Annual report year: 2016

  7. Published
  8. Published
  9. 2015
  10. Published

    Advanced Metrology for Characterization of Magnetic Tunnel Junctions. / Kjær, Daniel; Petersen, Dirch Hjorth (Supervisor); Hansen, Ole (Supervisor); Nielsen, Peter F. (Supervisor).

    DTU Nanotech, 2015. 149 p.

    Publication: ResearchPh.D. thesis – Annual report year: 2015

  11. Published

    Bubbles in graphene : a computational study. / Settnes, Mikkel; Power, Stephen; Lin, Jun; Petersen, Dirch Hjorth; Jauho, Antti-Pekka.

    In: Journal of Physics: Conference Series, Vol. 647, 012022, 2015.

    Publication: Research - peer-reviewConference article – Annual report year: 2015

  12. Published

    Characterization of magnetic tunnel junction test pads. / Østerberg, Frederik Westergaard; Kjær, Daniel; Nielsen, Peter Folmer; Hansen, Ole; Petersen, Dirch Hjorth.

    In: Journal of Applied Physics, Vol. 118, No. 14, 2015, p. 143901.

    Publication: Research - peer-reviewJournal article – Annual report year: 2015

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