Dirch Hjorth Petersen

  1. 2017
  2. Published
  3. Accepted/In press

    Precision of Micro Hall Effect Measurements in Scribe Line Test Pads. / Witthøft, Maria-Louise; Østerberg, Frederik Westergaard; Bogdanowicz, Janusz; Schulze, Andreas; Vanderhorst, Wilfried; Heinrichsen, Henrik H.; Nielsen, Peter D.; Hansen, Ole; Petersen, Dirch Hjorth.

    2017. Abstract from International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017, Monterey, CA, United States.

    Publication: Research - peer-reviewConference abstract for conference – Annual report year: 2017

  4. 2016
  5. Published

    Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper. / Wen, Liang Gong; Roussel, Philippe; Pedreira, Olalla Varela; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela I.; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Østerberg, Frederik Westergaard; Hansen, Ole; Petersen, Dirch Hjorth; Opsomer, Karl; Detavernie, Christophe; Wilson, Christopher J.; Van Elshocht, Sven; Croes, Kristof; Bommels, Jürgen; Tokei, Zsolt; Adelmann, Christoph.

    In: A C S Applied Materials and Interfaces, Vol. 8, No. 39, 2016, p. 26119-26125.

    Publication: Research - peer-reviewJournal article – Annual report year: 2016

  6. Published

    Defect evolution and dopant activation in laser annealed Si and Ge. / Cristiano, F.; Shayesteh, M.; Duffy, R.; Huet, K.; Mazzamuto, F.; Qiu, Y.; Quillec, M.; Henrichsen, H.H.; Nielsen, P. F.; Petersen, Dirch Hjorth; La Magna, A.; Caruso, G.; Boninelli, S.

    In: Materials Science in Semiconductor Processing, Vol. 42, 2016, p. 188-195.

    Publication: Research - peer-reviewJournal article – Annual report year: 2016

  7. Published
  8. Published

    Multi-electrode probe geometry optimization for characterization of magnetic tunnel junction stacks. / Cagliani, Alberto; Kjær, Daniel; Østerberg, Frederik Westergaard; Hansen, Ole; Nielsen, Peter Folmer; Petersen, Dirch Hjorth.

    2016. Abstract from 13th Joint MMM-Intermag Conference, San Diego, CA, United States.

    Publication: Research - peer-reviewConference abstract for conference – Annual report year: 2016

  9. Published

    Multi-electrode probe optimization for characterization of magnetic tunnel junction stacks. / Cagliani, Alberto; Kjær, Daniel; Østerberg, Frederik Westergaard; Hansen, Ole; Nielsen, Peter F.; Petersen, Dirch Hjorth.

    2016. Poster session presented at 13th Joint MMM-Intermag Conference, San Diego, CA, United States.

    Publication: Research - peer-reviewPoster – Annual report year: 2016

  10. Published

    Optimized SU-8 pyrolysis for fabrication of pyrolytic carbon microelectrodes. / Hassan, Yasmin Mohamed; Caviglia, Claudia; Hemanth, Suhith; Mackenzie, David; Petersen, Dirch Hjorth; Alstrøm, Tommy Sonne; Keller, Stephan Sylvest.

    2016. Abstract from 42nd International conference on Micro and Nano Engineering, Vienna, Austria.

    Publication: Research - peer-reviewConference abstract for conference – Annual report year: 2016

  11. Published
  12. Published
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