Dirch Hjorth Petersen

  1. 2017
  2. Published

    Breakthrough In Current In Plane Metrology For Monitoring Large Scale MRAM Production. / Cagliani, Alberto; Østerberg, Frederik Westergaard; Hansen, Ole; Petersen, Dirch Hjorth; Shiv, Lior; Nielsen, Peter F.

    2017 IEEE International Memory Workshop (IMW). IEEE, 2017. p. 169-171.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2017

  3. Published

    Breakthrough in current-in-plane tunneling measurement precision by application of multi-variable fitting algorithm. / Cagliani, Alberto; Østerberg, Frederik Westergaard; Hansen, Ole; Shiv, Lior; Nielsen, Peter Folmer; Petersen, Dirch Hjorth.

    In: Review of Scientific Instruments, Vol. 88, No. 9, 095005, 2017.

    Publication: Research - peer-reviewJournal article – Annual report year: 2017

  4. Published
  5. Published
  6. Published

    Mapping the electrical properties of large-area graphene. / Bøggild, Peter; Mackenzie, David; Whelan, Patrick Rebsdorf; Petersen, Dirch Hjorth; Buron, Jonas Christian Due; Zurutuza, Amaia; Gallop, John; Hao, Ling; Jepsen, Peter Uhd.

    In: 2D materials, Vol. 4, No. 4, 042003, 2017.

    Publication: Research - peer-reviewReview – Annual report year: 2017

  7. Published
  8. Published

    Precision of Micro Hall Effect Measurements in Scribe Line Test Pads. / Witthøft, Maria-Louise; Østerberg, Frederik Westergaard; Bogdanowicz, Janusz; Schulze, Andreas; Vanderhorst, Wilfried; Heinrichsen, Henrik H.; Nielsen, Peter D.; Hansen, Ole; Petersen, Dirch Hjorth.

    2017. Abstract from International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017, Monterey, CA, United States.

    Publication: Research - peer-reviewConference abstract for conference – Annual report year: 2017

  9. Accepted/In press
  10. 2016
  11. Published

    Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper. / Wen, Liang Gong; Roussel, Philippe; Pedreira, Olalla Varela; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela I.; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Østerberg, Frederik Westergaard; Hansen, Ole; Petersen, Dirch Hjorth; Opsomer, Karl; Detavernie, Christophe; Wilson, Christopher J.; Van Elshocht, Sven; Croes, Kristof; Bommels, Jürgen; Tokei, Zsolt; Adelmann, Christoph.

    In: A C S Applied Materials and Interfaces, Vol. 8, No. 39, 2016, p. 26119-26125.

    Publication: Research - peer-reviewJournal article – Annual report year: 2016

  12. Published
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