Daniel Kjær

  1. 2012
  2. Published

    Microprobe metrology for direct sheet resistance and mobility characterization. / Nielsen, Peter Folmer; Petersen, Dirch Hjorth; Lin, Rong; Jensen, Ane; Henrichsen, Henrik Hartmann; Gammelgaard, Lauge; Kjær, Daniel; Hansen, Ole.

    Proceedings of the 12th International Workshop on Junction Technology. 2012.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2012

  3. 2010
  4. Published

    Review of electrical characterization of ultra-shallow junctions with micro four-point probes. / Petersen, Dirch Hjorth; Hansen, Ole; Hansen, Torben M.; Bøggild, Peter; Lin, Rong; Kjær, Daniel; Nielsen, P.F.; Clarysse, T.; Vandervorst, W.; Rosseel, E.; Bennett, N.S.; Cowern, N.E.B.

    In: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, Vol. 28, No. 1C, 2010, p. 27-33.

    Publication: Research - peer-reviewJournal article – Annual report year: 2010

  5. 2009
  6. Published
  7. 2008
  8. Published

    Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions. / Petersen, Dirch Hjorth; Lin, Rong; Hansen, Torben Mikael; Rosseel, E.; Vandervorst, W.; Markvardsen, C.; Kjær, Daniel; Nielsen, Peter Folmer.

    In: Journal of Vacuum Science & Technology B, Vol. 26, No. 1, 2008, p. 362-367.

    Publication: Research - peer-reviewJournal article – Annual report year: 2008

  9. Published

    Micro Four-Point Probe with High Spatial Resolution for Ion Implantation and Ultra-Shallow Junction Characterization. / Kjær, Daniel; Lin, Rong; Petersen, Dirch Hjorth; Kopalidis, Petros M.; Eddy, Ronald; Walker, David A.; Egelhoff, William F.; Pickert, Larry.

    AIP Conference Proceedings. 1066. ed. American Institute of Physics, 2008.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2008

  10. 2007
  11. Published

    A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions. / Petersen, Dirch Hjorth; Lin, Rong; Hansen, Torben Mikael; Rosseel, E.; Vandervorst, W.; Markvardsen, C.; Kjær, Daniel; Nielsen, Peter Folmer.

    2007. Abstract from AVS INSIGHT-2007 Workshop, Napa, Canada.

    Publication: Research - peer-reviewConference abstract for conference – Annual report year: 2007

  12. Published
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