• Published

  Microprobe metrology for direct sheet resistance and mobility characterization

  Publication: Research - peer-review › Article in proceedings – Annual report year: 2012

• Published

  Review of electrical characterization of ultra-shallow junctions with micro four-point probes

  Publication: Research - peer-review › Journal article – Annual report year: 2010

• Published

  Accurate microfour-point probe sheet resistance measurements on small samples

  Publication: Research - peer-review › Journal article – Annual report year: 2009

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• Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

  ISSNs: 1071-1023

  American Institute of Physics, United States

  FI (2012): 1, ISI indexed (2012): yes

  Central database

  Journal

• Review of Scientific Instruments

  ISSNs: 0034-6748

  American Institute of Physics, United States

  FI (2012): 1, ISI indexed (2012): yes

  Central database

  Journal

• Journal of Micromechanics and Microengineering

  ISSNs: 0960-1317

  Institute of Physics Publishing, United Kingdom

  FI (2012): 1, ISI indexed (2012): yes

  Central database

  Journal

• Advanced metrology for magnetic tunnel junctions

  Project: PhD

• American Institute of Physics, 0-7354

  Central database

  Publisher