Silicon Microtechnology Group
Former organisation. 31-12-11.
MicroElectroMechanical Systems Section - Former organisation. 31-12-11.
Contact information
Ørsteds Plads, 345 Ø
DK-2800, Kgs. Lyngby
Denmark
- Website: http://www.nanotech.dtu.dk
- Phone: (+45) 4525 5700
- Fax: (+45) 4588 7762
Publications
(105)- Published
Ultra Shallow Arsenic Junctions in Germanium Formed by Millisecond Laser Annealing
Publication: Research - peer-review › Journal article – Annual report year: 2011
- Published
Intrinsic Low Hysteresis Touch Mode Capacitive Pressure Sensor
Publication: Research - peer-review › Article in proceedings – Annual report year: 2010
- Published
Heterogeneous catalysis in highly sensitive microreactors
Publication: Research › Ph.d. thesis – Annual report year: 2010
Most frequent journals
Journal of Applied Physics
ISSNs: 0021-8979
American Institute of Physics, United States
FI (2012): 1, ISI indexed (2012): yes
Central database
Journal
Review of Scientific Instruments
ISSNs: 0034-6748
American Institute of Physics, United States
FI (2012): 1, ISI indexed (2012): yes
Central database
Journal
Microelectronic Engineering
ISSNs: 0167-9317
Elsevier BV, Netherlands
FI (2012): 2, ISI indexed (2012): yes
Central database
Journal
Activities
(8)Talk about "Micro Cutting and Forming of thin aluminium foils" presented at The 5th International conferrence on MicroManufacturing ICOMM/4M
Activity: Lecture and oral contribution
Talk about "Micro Cutting and Forming of thin aluminium foils" presented at The 5th International conferrence on MicroManufacturing ICOMM/4M
Activity: Lecture and oral contribution
Talk about "Review of electrical characterization of ultra-shallow junctions with micro four-point probes" at INSIGHT 2009, San Francisco, US
Activity: Lecture and oral contribution
Most frequent publishers
Most downloaded publications
- 726
MEMS Multi-sensor for Data Storage Tags used in Fisheries Research
Publication: Research › Ph.d. thesis – Annual report year: 2008
downloads - 719
Piezoresistivity in Microsystems
Publication: Research › Ph.d. thesis – Annual report year: 2008
downloads - 583
Micro-four-point Probe Hall effect Measurement method
Publication: Research - peer-review › Journal article – Annual report year: 2008
downloads - 581
Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design
Publication: Research - peer-review › Journal article – Annual report year: 2009
downloads - 497
Accurate microfour-point probe sheet resistance measurements on small samples
Publication: Research - peer-review › Journal article – Annual report year: 2009
downloads
Latest activities and conferences
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