Silicon Microtechnology

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  1. 2013
  2. Published

    Crystallographic dependence of the lateral undercut wet etch rate of Al0.5In0.5P in diluted HCl for III-V sacrificial release. / Ansbæk, Thor; Semenova, Elizaveta; Yvind, Kresten; Hansen, Ole.

    In: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, Vol. 31, No. 1, 2013, p. 011209.

    Publication: Research - peer-review › Journal article – Annual report year: 2013

  3. Published

    Experimental observation of plasmons in a graphene monolayer resting on a two-dimensional subwavelength silicon grating. / Zhu, Xiaolong; Yan, Wei; Jepsen, Peter Uhd; Hansen, Ole; Mortensen, N. Asger; Xiao, Sanshui .

    In: Applied Physics Letters, Vol. 102, No. 13, 2013, p. 131101.

    Publication: Research - peer-review › Journal article – Annual report year: 2013

  4. Published

    Integrated view of genome structure and sequence of a single DNA molecule in a nanofluidic device. / Marie, Rodolphe ; Pedersen, Jonas Nyvold; L. V. Bauer, David ; Rasmussen, Kristian Hagsted; Yusuf, Mohammed; Volpi, Emanuela ; Flyvbjerg, Henrik; Kristensen, Anders; U. Mirb, Kalim.

    In: Proceedings of the National Academy of Sciences of the United States of America, Vol. 110, No. 13, 2013, p. 204893-4898.

    Publication: Research - peer-review › Journal article – Annual report year: 2013

  5. E-pub ahead of print

    Resonant MEMS tunable VCSELL. / Ansbæk, Thor; Chung, Il-Sug; Semenova, Elizaveta; Hansen, Ole; Yvind, Kresten.

    In: I E E E Journal on Selected Topics in Quantum Electronics, Vol. 6, No. 1, 2013.

    Publication: Research - peer-review › Journal article – Annual report year: 2013

  6. Published

    Self-sustained carbon monoxide oxidation oscillations on size-selected platinum nanoparticles at atmospheric pressure. / Jensen, Robert; Andersen, Thomas; Nierhoff, Anders Ulrik Fregerslev; Pedersen, Thomas; Hansen, Ole; Dahl, Søren; Chorkendorff, Ib.

    In: Physical Chemistry Chemical Physics, Vol. 15, 2013, p. 2698-2702.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  7. Published

    Using TiO2 as a Conductive Protective Layer for Photocathodic H2 Evolution. / Seger, Brian; Pedersen, Thomas; Laursen, Anders Bo; Vesborg, Peter Christian Kjærgaard; Hansen, Ole; Chorkendorff, Ib.

    In: American Chemical Society. Journal, Vol. 135, No. 3, 2013, p. 1057–1064.

    Publication: Research - peer-review › Journal article – Annual report year: 2013

  8. 2012
  9. Published

    Activation and thermal stability of ultra-shallow B+-implants in Ge. / Yates, B. R.; Darby, B. L.; Petersen, Dirch Hjorth; Hansen, Ole; Lin, Rong; Nielsen, P. F.; Romano, L.; Doyle, B. L.; Kontos, A.; Jones, K. S.

    In: Journal of Applied Physics, Vol. 112, No. 12, 2012.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  10. Published

    Advanced characterization of carrier profiles in germanium using micro-machined contact probes. / Clarysse, T.; Konttinen, M.; Parmentier, B.; Moussa, A.; Vandervorst, W.; Impellizzeri, G.; Napolitani, E.; Privitera, V.; Nielsen, Peter Folmer; Petersen, Dirch Hjorth; Hansen, Ole.

    In: A I P Conference Proceedings Series, Vol. 1496, 2012, p. 167-170.

    Publication: Research - peer-review › Conference article – Annual report year: 2012

  11. Published

    A MEMS Energy Harvesting Device for Vibration with Low Acceleration. / Triches, Marco; Wang, Fei; Crovetto, Andrea; Lei, Anders; You, Qiong; Zhang, Xiaoqing; Hansen, Ole; Dziuban, Jan (Editor); Walczak, Rafal (Editor).

    In: Procedia Engineering, Vol. 47, 2012, p. 770-773.

    Publication: Research - peer-review › Conference article – Annual report year: 2012

  12. Published

    Broadband light-extraction enhanced by arrays of whispering gallery resonators. / Zhu, Xiaolong; Ou, Yiyu; Jokubavicius, Valdas; Syvajarvi, Mikael; Hansen, Ole; Ou, Haiyan; Mortensen, N. Asger; Xiao, Sanshui .

    In: Applied Physics Letters, Vol. 101, No. 24, 2012, p. 241108.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  13. Published

    DNA Catenation Maintains Structure of Human Metaphase Chromosomes. / L. V. Bauer, David ; Marie, Rodolphe ; Rasmussen, Kristian Hagsted; Kristensen, Anders; U. Mir, Kalim.

    In: Nucleic Acids Research, Vol. 40, No. 22, 2012, p. 11428-11434.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  14. Published

    Evaporation of Water Droplets on “Lock-and-Key” Structures with Nanoscale Features. / Zhu, Xiaolong; Zhang, Chi; Liu, Xiaohan; Hansen, Ole; Xiao, Sanshui ; Mortensen, N. Asger; Zi, Jian.

    In: Langmuir, Vol. 28, No. 25, 2012, p. 9201–9205.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  15. Published

    Fabrication and characterization of MEMS-based PZT/PZT bimorph thick film vibration energy harvesters. / Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian ; Hansen, K; Guizzetti, M; Birkelund, Karen; Thomsen, Erik Vilain; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 9, 2012.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  16. Published

    Graphene Conductance Uniformity Mapping. / Buron, Jonas Christian Due; Petersen, Dirch Hjorth; Bøggild, Peter; Cooke, David G.; Hilke, Michael; Sun, Jie; Whiteway, Eric; Nielsen, Peter F.; Hansen, Ole; Yurgens, August; Jepsen, Peter Uhd.

    In: Nano Letters, 2012.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  17. Published

    High mass resolution time of flight mass spectrometer for measuring products in heterogeneous catalysis in highly sensitive microreactors.. / Andersen, Thomas; Jensen, Robert; Christensen, M. K.; Pedersen, Thomas; Hansen, Ole; Chorkendorff, I.

    In: Review of Scientific Instruments, Vol. 83, No. 7, 2012.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  18. Published

    Hydrogen Production Using a Molybdenum Sulfide Catalyst on a Titanium-Protected n+p-Silicon Photocathode. / Seger, Brian; Laursen, Anders Bo; Vesborg, Peter Christian Kjærgaard; Pedersen, Thomas; Hansen, Ole; Dahl, Søren; Chorkendorff, Ib.

    In: Angewandte Chemie (International Edition), Vol. 51, No. 36, 2012, p. 9128-9131.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  19. Published

    Hydrogen Production Using a Molybdenum Sulfide Catalyst on a Titanium-Protected n+p-Silicon Photocathode. / Seger, Brian; Laursen, Anders Bo; Vesborg, Peter Christian Kjærgaard; Pedersen, Thomas; Hansen, Ole; Dahl, Søren; Chorkendorff, Ib.

    In: Angewandte Chemie, Vol. 124, No. 36, 2012, p. 9262-9265.

    Publication: Research - peer-review › Journal article – Annual report year: 2013

  20. Published

    Hydrogen Production Using a Molybdenum Sulfide Catalyst on a Titanium‐Protected n+p‐Silicon Photocathode. / Seger, Brian; Laursen, Anders B.; Vesborg, Peter C. K.; Pedersen, Thomas; Hansen, Ole; Dahl, Søren; Chorkendorff, Ib.

    In: Angewandte Chemie, Vol. 51, No. 36, 2012, p. 9262–9265.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  21. Published

    In situ light spectroscopy in the environmental transmission electron microscope (ETEM). / Cavalca, Filippo; Langhammer, C.; Pedersen, Thomas; Dahl, S.; Wagner, Jakob Birkedal; Hansen, Thomas Willum.

    In: EMC2012 proceedings. 2012.

    Publication: Research - peer-review › Conference abstract in proceedings – Annual report year: 2012

  22. Published

    Junction leakage measurements with micro four-point probes. / Lin, Rong ; Petersen, Dirch Hjorth; Wang, Fei; Yates, Bradley R.; Jones, Kevin S.; Hansen, Ole; Kontos, Alex; Nielsen, Peter Folmer.

    In: A I P Conference Proceedings Series, Vol. 1496, 2012, p. 175-178.

    Publication: Research - peer-review › Conference article – Annual report year: 2012

  23. Published

    Large area characterisation of CVD graphene electrical properties. / Buron, Jonas Christian Due; Jepsen, Peter Uhd; Petersen, Dirch Hjorth; Bøggild, Peter; Hansen, Ole; Cooke, David; Hilke, Michael; Whiteway, Eric; Sun, Jie; Yurgens, Avgust; Nielsen, Peter F.

    In: Carbonhagen 2012: 3rd Symposium on graphene and carbon nanotubes. 2012. p. 20.

    Publication: Research - peer-review › Conference abstract in proceedings – Annual report year: 2012

  24. Published

    MEMS fabricated energy harvesting device with 2D resonant structure. / Crovetto, Andrea ; Wang, Fei; Triches, Marco; Hansen, Ole.

    2012. Paper presented at PowerMEMS 2012, Atlanta, United States.

    Publication: Research - peer-review › Paper – Annual report year: 2012

  25. Published

    Microfluidic device and method for processing of macromolecules. / Kristensen, Anders (Inventor); Marie, Rodolphe (Inventor); Rasmussen, Kristian Hagsted (Inventor); Kalim Ullah, Mir (Inventor).

    IPC No.: B01L3/00. May 03, 2012.

    Publication: Research › Patent – Annual report year: 2012

  26. Published

    Micro Hall effect metrology. / Petersen, Dirch Hjorth; Hansen, Ole; Wang, Fei; Østerberg, Frederik Westergaard; Henrichsen, Henrik Hartmann; Bøggild, Peter; Lin, Rong; Nielsen, Peter Folmer; Clarysse, T.; Rosseel, E. ; Vandervorst, W. .

    2012. Abstract from International Conference on Ion Implantation Technology, Valladolid, Spain.

    Publication: Research - peer-review › Conference abstract for conference – Annual report year: 2012

  27. Published

    Microprobe metrology for direct sheet resistance and mobility characterization. / Nielsen, Peter Folmer; Petersen, Dirch Hjorth; Lin, Rong; Jensen, Ane; Henrichsen, Henrik Hartmann; Gammelgaard, Lauge; Kjær, Daniel; Hansen, Ole.

    In: Proceedings of the 12th International Workshop on Junction Technology. 2012.

    Publication: Research - peer-review › Article in proceedings – Annual report year: 2012

  28. Published

    On the pathway of photoexcited electrons: probing photon-to-electron and photon-to-phonon conversions in silicon by ATR-IR. / Karabudak, Engin; Yüce, Emre; Schlautmann, Stefan; Hansen, Ole; Mul, Guido; Gardeniers, Han (J.G.E.).

    In: Physical Chemistry Chemical Physics, Vol. 14, No. 31, 2012, p. 10882-10885.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  29. Published

    Optical fiber sensors fabricated by the focused ion beam technique. / Yuan, Scott Wu; Wang, Fei; Bang, Ole.

    In: Proceedings of SPIE, the International Society for Optical Engineering, Vol. 8421, 2012, p. 842173.

    Publication: Research - peer-review › Conference article – Annual report year: 2012

  30. Published

    Photoelectrocatalysis and electrocatalysis on silicon electrodes decorated with cubane-like clusters. / Hou, Yidong; Abrams, Billie L.; Vesborg, Peter Christian Kjærgaard; Björketun, Mårten; Herbst, Konrad; Bech, Lone; Seger, Brian; Pedersen, Thomas; Hansen, Ole; Rossmeisl, Jan; Dahl, Søren; Nørskov, Jens Kehlet; Chorkendorff, Ib.

    In: Journal of Photonics for Energy, Vol. 2, 2012.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  31. Published

    Preliminary Performance Evaluation of MEMS-based Piezoelectric Energy Harvesters in Extended Temperature Range. / Xu, R.; Borregaard, L.M.; Lei, A.; Guizzetti, M.; Ringgaard, E.; Zawada, T.; Hansen, Ole; Thomsen, E.V.; Dziuban, Jan (Editor); Walczak, Rafal (Editor).

    In: Procedia Engineering, Vol. 47, 2012, p. 1434-1437.

    Publication: Research - peer-review › Conference article – Annual report year: 2012

  32. Published

    Quantitative Mapping of Large Area Graphene Conductance. / Buron, Jonas Christian Due; Petersen, Dirch Hjorth; Bøggild, Peter; Cooke, David G.; Hilke, Michael; Sun, Jie; Whiteway, Eric; Hansen, Ole; Nielsen, Peter F.; Yurgens, August; Jepsen, Peter Uhd.

    In: 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz). IEEE, 2012.

    Publication: Research - peer-review › Article in proceedings – Annual report year: 2012

  33. Published

    Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting. / Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian ; Hansen, K.; Guizzetti, M.; Birkelund, Karen; Thomsen, Erik Vilain; Hansen, Ole; French, Paddy (Editor).

    In: Sensors and Actuators A: Physical, Vol. 188, 2012, p. 383-388.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  34. Published

    Sensitivity of charge transport measurements to local inhomogeneities. / Koon, Daniel; Wang, Fei; Petersen, Dirch Hjorth; Hansen, Ole.

    2012. Abstract from APS March Meeting 2012, Boston, United States.

    Publication: Research - peer-review › Conference abstract for conference – Annual report year: 2012

  35. 2008
  36. Published

    Short-Cycle Thermal Nanoimprint using Smart Stamps. / Pedersen, Rasmus Haugstrup; Rasmussen, Kristian Hagsted; Lorenzen, L.V.; Lüscher, C.J.; Hansen, Ole; Kristensen, Anders.

    In: Proceeding of The 7th International Conference on Nanoimprint and Nanoprint Technology: NNT'08 October 13-15 2008. 2008.

    Publication: Research - peer-review › Article in proceedings – Annual report year: 2008

  37. Published

    Short-Cycle Thermal Nanoimprint using Smart Stamps. / Pedersen, Rasmus Haugstrup; Rasmussen, Kristian Hagsted; Lorenzen, L.V.; Lüscher, Ch. J; Hansen, Ole; Kristensen, Anders.

    In: Proceeding of 34th International Conference on Micro and Nano Engineering: MNE 2008 15-18 September 2008. Athens, Greece, 2008.

    Publication: Research - peer-review › Article in proceedings – Annual report year: 2008

  38. Published

    Short-Cycle Thermal Nanoimprint using Smart Stamps. / Pedersen, Rasmus Haugstrup; Rasmussen, Kristian Hagsted; Lorenzen, I.V.; Lüscher, C.J; Hansen, Ole; Kristensen, Anders.

    2008. Poster session presented at The 7th International Conference on Nanoimprint and Nanoprint Technology, Kyoto, Japan, .

    Publication: Research - peer-review › Poster – Annual report year: 2008

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