1. 2015
  2. Published
  3. E-pub ahead of print
  4. 2014
  5. Published
  6. Published

    An Arduino-Based Hardware Lock and Sensor Data Collection System for Cleanroom Equipment. / Johansen, Leif (Author); Nyholt, Henrik (Author); Hemmingsen, Jens H. (Author); Eskildsen, Thøger (Author); Hübner, Jörg (Author).

    2014. IEEE University Government Industry Micro/Nano Technology Symposium, Cambridge, MA, United States, 15/06/2014.

    Publication: ResearchSound/Visual production (digital) – Annual report year: 2014

  7. Published

    Depositing Materials on the Micro- and Nanoscale. / Mar, Mikkel Dysseholm; Herstrøm, Berit; Shkondin, Evgeniy; Pholprasit, Patama; Jensen, Flemming.

    Abstract Book - DTU Sustain Conference 2014. Kgs. Lyngby : Technical University of Denmark, 2014.

    Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2014

  8. Published

    Efficient fabrication of micro- and nano-systems. / Birkelund, Karen; Hanberg, Peter Jesper; Jørgensen, Anders Michael; Hübner, Jörg.

    Abstract Book - DTU Sustain Conference 2014. Kgs. Lyngby : Technical University of Denmark, 2014.

    Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2014

  9. Published

    Electron Beam Lithography for nano-patterning. / Greibe, Tine; Anhøj, Thomas Aarøe; Khomtchenko, Elena; Michael-Lindhard, Jonas; Johansen, Leif.

    Abstract Book - DTU Sustain Conference 2014. Kgs. Lyngby : Technical University of Denmark, 2014.

    Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2014

  10. Published

    Etching patterns on the micro‐ and nanoscale. / Michael-Lindhard, Jonas; Herstrøm, Berit; Stöhr, Frederik; Jensen, Flemming.

    Abstract Book - DTU Sustain Conference 2014. Kgs. Lyngby : Technical University of Denmark, 2014.

    Publication: Research - peer-reviewConference abstract in proceedings – Annual report year: 2014

  11. Published

    Full 3D characterization of high aspect ratio microstructures. / Stöhr, Frederik; Michael-Lindhard, Jonas; Simons, Hugh; Hübner, Jörg; Jensen, Flemming; Hansen, Ole; Poulsen, Henning Friis; Garnæs, Jørgen.

    2014. Poster session presented at 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland.

    Publication: Research - peer-reviewPoster – Annual report year: 2014

  12. Published
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