1. Research › Ph.D. thesis
  2. Published
  3. Published
  4. Published
  5. Published
  6. Published

    Epitaxial growth of SiGe layers and nanostructures. / Pedersen, Erik Vesterlund; Jensen, Flemming (Supervisor).

    Kgs. Lyngby, Denmark : Technical University of Denmark (DTU), 1999.

    Publication: ResearchPh.D. thesis – Annual report year: 1999

  7. Published

    Nanostructuring with Bonding and Structural Studies of Plasma Assisted Wafer Bonding. / Poulsen, Mette; Jensen, Flemming (Supervisor); Feidenhans'l, R. (Supervisor).


    Publication: ResearchPh.D. thesis – Annual report year: 2006

  8. Published
  9. Research › Book chapter
  10. Published

    Fast‐writing E‐beam for defining large arrays of nano‐holes. / Højlund-Nielsen, Emil; Clausen, Jeppe Sandvik; Christiansen, Alexander Bruun; Greibe, Tine; Mortensen, N. Asger; Kristensen, Anders.

    Proceedings of the 39th International Conference on Micro and Nano Engineering. 2013.

    Publication: Research - peer-reviewBook chapter – Annual report year: 2014

  11. Published

    Two-Step Fabrication of Metal-Coated Silicon Nanopillars with Large Raman Enhancement. / Schmidt, Michael Stenbæk; Hübner, Jörg; Boisen, Anja.

    Xxii International Conference on Raman Spectroscopy. Melville : American Institute of Physics, 2010. p. 912-913 (Aip Conference Proceedings; No. 1267).

    Publication: Research - peer-reviewBook chapter – Annual report year: 2010

  12. Research › Article in proceedings
  13. Published

    Modeling of CMUTs with Multiple Anisotropic Layers and Residual Stress. / Engholm, Mathias; Thomsen, Erik Vilain.

    Proceedings of IEEE International Ultrasonics Symposium (IUS), 2014 . IEEE, 2014. p. 2603 - 2606 .

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2014

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