1. Research › Journal article
  2. Published

    Single-spot e-beam lithography for defining large arrays of nano-holes. / Højlund-Nielsen, Emil; Greibe, Tine; Mortensen, N. Asger; Kristensen, Anders.

    In: Microelectronic Engineering, Vol. 121, 2014, p. 104-107.

    Publication: Research - peer-reviewJournal article – Annual report year: 2014

  3. Published
  4. E-pub ahead of print
  5. Published
  6. Research › Conference article
  7. Published
  8. Research › Conference abstract in journal
  9. Published
  10. Research › Ph.D. thesis
  11. Published
  12. Published
  13. Published
  14. Published

    Epitaxial growth of SiGe layers and nanostructures. / Pedersen, Erik Vesterlund; Jensen, Flemming (Supervisor).

    Kgs. Lyngby, Denmark : Technical University of Denmark (DTU), 1999.

    Publication: ResearchPh.D. thesis – Annual report year: 1999

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