1. Published

    Fast‐writing E‐beam for defining large arrays of nano‐holes. / Højlund-Nielsen, Emil; Clausen, Jeppe Sandvik; Christiansen, Alexander Bruun; Greibe, Tine; Mortensen, N. Asger; Kristensen, Anders.

    Proceedings of the 39th International Conference on Micro and Nano Engineering. 2013.

    Publication: Research - peer-reviewBook chapter – Annual report year: 2014

  2. Published

    Fast-writing E-beam for large arrays of nano-holes. / Højlund-Nielsen, Emil; Clausen, Jeppe Sandvik; Christiansen, Alexander Bruun; Greibe, Tine; Mortensen, N. Asger; Kristensen, Anders.

    2013. Poster session presented at 39th International Conference on Micro and Nano Engineering, London, United Kingdom.

    Publication: Research - peer-reviewPoster – Annual report year: 2013

  3. Published

    Full 3D characterization of high aspect ratio microstructures. / Stöhr, Frederik; Michael-Lindhard, Jonas; Simons, Hugh; Hübner, Jörg; Jensen, Flemming; Hansen, Ole; Poulsen, Henning Friis; Garnæs, Jørgen.

    2014. Poster session presented at 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland.

    Publication: Research - peer-reviewPoster – Annual report year: 2014

  4. Published
  5. Published

    Growth of GaSb1-xBix by molecular beam epitaxy. / Song, Yuxin; Wang, Shumin; Roy, Ivy Saha; Shi, Peixiong; Hallen, Anders.

    In: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, Vol. 30, No. 2, 2012, p. 02B114 .

    Publication: Research - peer-reviewJournal article – Annual report year: 2012

  6. Published

    High pattern density nanoimprint lithography stamps fabricated by means of negative electron beam lithography resist, TEBN-1, and dry etching in silicon. / Olsen, Brian Bilenberg; Schøler, Mikkel; Schmidt, Michael Stenbæk; Shi, Peixiong; Bøggild, Peter; Frandsen, Lars Hagedorn; Borel, Peter Ingo; Kristensen, Anders.

    2005. Poster session presented at The 4th Internternational Conference on Nanoimprint and Nanoprint, NNT'05, 19 - 21 October, Nare, Japan, .

    Publication: Research - peer-reviewPoster – Annual report year: 2005

  7. Published
  8. Published

    Large area fabrication of leaning silicon nanopillars for surface enhanced raman spectroscopy. / Schmidt, Michael Stenbæk; Hübner, Jörg; Boisen, Anja.

    In: Advanced Materials, Vol. 24, 2011, p. OP11-OP18.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  9. Published
  10. Published

    Manufacturing and Characterization of Silicon Compound Refractive Lenses for Focussing of Hard X-Rays. / Stöhr, Frederik; Michael-Lindhard, Jonas; Simons, Hugh; Hübner, Jörg; Jensen, Flemming; Hansen, Ole; Snigirev, A.; Poulsen, Henning Friis.

    2013. Abstract from 22nd International Congress on X-Ray Optics and Microanalysis, Hamburg, Germany.

    Publication: ResearchConference abstract for conference – Annual report year: 2014

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